Vacuum Equipment

ULVAC’s base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.

Auto Leak Testing System

ULVAC has leak detectors available not only for leak tests for vacuum systems but also for other applications ranging from packing package leak detection to the special detection of gas leaks.

Refrigerant Charging Machine

Charging Machine is a perfect solution for high for high accuracy and fast speed charging, integrating multiple advantaged and advanced technology.

Oil Charging System

Oil Charging Machine

OC Series refrigeration oil charging Machine is the perfect solution of high accuracy & high charging speed.

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Vacuum Furnace System

ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.

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Vacuum Evaporating System

This equipment, employing vertical double door open mechanism is applied to deposit Al reflection film and superposition SIOx protection film on the reflection board of automotive lighting parts and decoration. Perform film metallization on the PC,BMC,ABS metal materials.

Vacuum Roll Coating System

Roll coaters are available for a variety of applications ranging from gold/silver thread coating to holographic coating for anti-counterfeiting and additionally flexible substrate coating.

Vacuum Cooling System

The application  of vacuum cooling  technology  has caused  a revolution in the green vegetables cold  chain  distribution system. In summer time, vegetables tend to deteriorate very fast after  harvest from  the field  under  high  temperature.

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Vacuum Distillation System

The application  of vacuum cooling  technology  has caused  a revolution in the green vegetables cold  chain  distribution system. In summer time, vegetables tend to deteriorate very fast after  harvest from  the field  under  high  temperature.

Vacuum Freeze Dry System

Vacuum Freeze Drying / Vacuum Drying System for low-volume production and research by the pharmaceutical industry require space-saving designs, low cost and high functionality. ULVAC has released the DFM Series to meet these demands.