Vacuum Equipment

ULVAC’s base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.

Helium Leak Test

The helium leak test is a measurement method using a leak detection system to detect leakage from a change in helium partial pressure in a vacuum.