Process Gas Monitor

“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.

Software for Gas Analysis Qulee QCS
“Qulee QCS” is a software package for gas analyzers and process monitors manufactured by ULVAC. This is suitable for all Quadrupole gas spectrometers made by ULVAC. Older software can be upgraded to this QCS version. Data acquisition and saving data is carried out by simple key strokes.
Quadrupole Mass Spectrometer with Differential Pumping Kit

A variation of Qulee, adding new features in response to customer needs.By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for process management and residual gas analysis.

Reactive Gas Process Monitoring System Qulee RGM-202 / RGM-302
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes. Using ULVAC’s original ion source and pumping system enables you to achieve stable measurements results.
Residual Gas Analysis/Process Gas Monitor CGM
“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).
Reactive Gas Process Monitoring System Qulee BGM

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
Most appropriate for system control of vacuum evaporator and various types of vacuum furnaces.

Reactive Gas Process Monitoring System Qulee HGM
ULVAC’s new “Qulee HGM” residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5×10-6 A/Pa, Qulee HGM can meet the needs of various R&D and other vacuum system process monitoring.