Vacuum Valve

ULVAC provides various vacuum valves based on extensive technical knowledge. Use ULVAC’s valves for all atmospheric pressure through ultra high vacuum applications. Satisfaction guaranteed!

Vacuum Angle Valve

Vacuum Angle Valve VLP-SA/VLP-SB/VLP-MB series
Stainless steel made valve from 5/8 ~ 14 inch.
Double-acting cylinder with either O-ring shaft or
bellows feedthrough. 

Vacuum Angle Valve VLH-SB/VLH-MB series
Stainless steel made valve from 5/8 ~ 6 inch. Manual cylinder with bellows feedthrough. Type of flange is JIS-VF, ISO-KF, ISO-K and ISO-CF.

Vacuum Angle Valve VLB-SA/VLB-SB series
Stainless steel made valve from 5/8 ~ 2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. 

Vacuum Angle Valve VLP-U series
Soft steel made large size valve from 20 ~ 36 inch. Double-acting cylinder with O-ring shaft feedthrough. Type of flange is JIS-VF.

Gate Valves

Large Pendulum Valve VFR Series
ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.

High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals VAP Series
The VAP Series are pneumatically-operated high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. 

High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals VAH Series
The VAH Series are manual high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. 

Other Type of  Valve