Power Generator 's ULVAC offers a variety of electronic guns and power supplies that support evaporation deposition technology.
Pulsed DC Power generators DPG-P Series [DPG-5P/DPG-10P]
Active Arc Killer A2K Series
In the reactive sputtering processes, the A2K series abnormal discharge prevention unit applies positive voltage pulses to a DC power generator to neutralize the charge on the target.This unit can be easily mounted to existing equipment, and it achieves improvements in yield ratio and throughput at low cost.
DC Power generator DPG-10/DPG-20
EB Power Generator HPS-N Series
The HPS-N Series is a series of power generator that support electron beam evaporation sources and feature improvements in circuit stability and performance based on technologies we have accumulated over many years and our proven track record. When used in combination with the EGC-10GS EB Gun Controller, both EG guns for optical films and EB guns for metal films can be supported.
EB Gun for Optical Evaporation EGP-1G
RF Power Supply RFS-N Series
The RFS-N Series of RF power generators for plasma processes are available at 13.56MHz with 0.5kW, 1kW, 3kW, or 5kW output. These RF power generators have achieved a decrease in size and weight through the use of a high efficiency RF amplifier.These RF power generators are also equipped with an auto matching controller function, which allows for RF power generator power control and matching system control with the power generator unit itself.
EB gun for vacuum evaporation EGK/EGL/EGO Series
ULVAC EB guns for electron beam evaporation all use magnetic field deflection, and are structured to minimize contamination from the evaporated material. A wide lineup of models is available. The EGK Series is designed for low-capacity research applications, the EGL Series is for metal film production, and the EGO Series is for optical film production.