Features
- Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
- Useful for load/unload lock chambers which require high throughput.
- A universal induction motor is used. An explosion proof motor is available as an option.
- For motor power. Specify voltage required when ordering. Either 200 VAC Class or Multiple voltage motors are available.
Applications
- Clean gas vacuum pumping such as air, inert gas.
- Load/unload lock chambers of various types of deposition equipment.
- General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.
Specifications
