ULVAC provides various vacuum valves based on extensive technical knowledge. Use ULVAC’s valves for all atmospheric pressure through ultra high vacuum applications. Satisfaction guaranteed!

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Vacuum Angle Valve VLP-SA Series
Stainless steel made valve from 5/8 ~ 14 inch.
Double-acting cylinder with either O-ring shaft or
bellows feedthrough. 

Vacuum Angle Valve VLH-SB/VLH-MB series
Stainless steel made valve from 5/8 ~ 6 inch. Manual cylinder with bellows feedthrough. Type of flange is JIS-VF, ISO-KF, ISO-K and ISO-CF.

Vacuum Angle Valve VLB-SA/VLB-SB series
Stainless steel made valve from 5/8 ~ 2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. 

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High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals VAP Series
The VAP Series are pneumatically-operated high vacuum gate valves developed using ULVAC’s wealth of accumulated vacuum technology and experience. 

High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals VAH Series
The VAH Series are manual high vacuum gate valves developed using ULVAC’s wealth of accumulated vacuum technology and experience. 

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ULVAC’s VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.