Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.



  • Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
  • Useful for load/unload lock chambers which require high throughput.
  • A universal induction motor is used. An explosion proof motor is available as an option.
  • For motor power. Specify voltage  required when ordering. Either 200 VAC Class or Multiple voltage motors are available.


  • Clean gas vacuum pumping such as air, inert gas.
  • Load/unload lock chambers of various types of deposition equipment.
  • General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.