R&D Equipment

Innovative and advanced vacuum technologies to blaze a trail for the future. ULVAC has been providing
all kinds of industries with vacuum technology based products and materials essential for them under
the basic managerial philosophy of "aiming at contributing to the evolution of industries and sciences
by using vacuum technologies and all peripheral technologies.

Rapid Thermal Annealers

Mini Lamp Annealer MILA-5000 series

Perfect for research and development on small samples.Capable of high-speed heating, high-speed cooling, and clean heating.

Infrared Lamp Heating System QHC series
The QHC series is a high-speed heating and cooling system, a combination of an Infrared Gold Image Furnace and temperature controller...

High Temperature Rapid Thermal Annealing System HT-RTA59HD
This desktop ultra-high temperature annealing system achieves high reflection efficiency by heating in a focused manner precious materials like SiC and other small materials with high melting points.

Simplified Infrared Lamp Heating System SSA series
A simplified system with an Infrared Gold Image Furnace and a quartz chamber.A low-cost heating system consist of an Infrared Gold Image Furnace and quartz chamber including a sample holder.

Mini Lamp Annealer MILA-5050
This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.

Variable Atmosphere Lamp Heating System VHC series
The VHC series is equipped with vacuum pump system and Pirani vacuum gauge as well as the features of QHC series.

Spot Focused Infrared Gold Image Furnace System MIRO series
A compact spot focused Infrared Gold Image Furnace capable of heating up to 1800 °C. This furnace can be used for zone melting and basic SiC power device experiments.

Thermoelectric Testers

Seebeck Coefficient / Electric Resistance Measurement System ZEM-3 series
A simplified system with an Infrared Gold Image Furnace and a quartz chamber. A low-cost heating system consist of an Infrared Gold Image Furnace and quartz chamber including a sample holder.

Scanning Thermal Probe Micro-image STPM-1000
STPM-1000 is used for evaluating Seebeck coefficient and thermal conductivity simultaneously. Simple evaluation of thermoelectric materials is possible by simultaneous evaluations of seebeck coefficient and thermal conductivity. 

Power Generation Efficiency Characteristics Evaluation System PEM-2
Property evaluations of thermoelectric generator modules

Laser Flash Method Thermal Constant Measurement System TC-9000 series
Thermal conductivity measurements of a wide variety of materials from polymers to metals. 

Seebeck Coefficient / Electric Resistance Measurement System ZEM-5 series
A series corresponding to special specifications for the properties of various thermoelectric materials and thin films

Thermoelectric Conversion Efficiency Evaluation System for Small Modules Mini-PEM
Measure thermoelectric conversion efficiency for thermoelectric material alone and a pair of thermoelectric material

AC Method Thermal Diffusivity Measurement System LaserPIT
Thermal conductivity evaluations of various films in the surface direction

2-Omega Method Nano Thin Film Thermal Conductivity Meter TCN-2ω
Capable of easily evaluating thermal conductivity of nano-thin films.

Rapid Heating & Cooling IR Furnace


X-Ray Photoelectron Spectroscopy / XPS

PHI Quantes
PHI 5000 VersaProbe III
PHI X-tool
PHI Quantera II™

Auger Electron Spectroscopy / AES,SAM

PHI 710
PHI 4700 Thin Film Analyzer™

Time-of-Flight SIMS / TOF-SIMS


Dynamic SIMS / D-SIMS


Sheet Steel Annealing Simulator

CAS Series

ARC Plasma Deposition

Arc Plasma Deposition

Vacuum Coater

VPC Series
DEPOX Series

Other Equipments

Micro Paddle
Microbial Activity
Gravite Control Device