Vacuum Component

Vacuum technology is essential for diverse industries. As a comprehensive manufacturer of vacuum components supporting industrial infrastructure, we offer an extensive lineup of vacuum components.

    Bringing our comprehensive capabilities into full play, we will develop business from both aspects of regions and industrial fields in an aim to become a driving force of ULVAC’s global business.

Dry Vacuum Pump
Vacuum Pump
Oil Rotary Vacuum Pump
Mechanical Booster Pump
Turbo Molecular Pump
Oil Diffussion Pump
Sputtering ION Pump
ULVOIL (Vacuum Oil)

Vacuum Pump

ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.

Vacuum Gauge

ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications.

Pirani Vacuum Gauge
Hot Cathode Gauge
Cold Cathode Gauge
Vacuum Angle Valve
Pendulum Valve

Vacuum Valves

ULVAC provides various vacuum valves based on extensive technical knowledge. Use ULVAC’s valves for all atmospheric pressure through ultra high vacuum applications. Satisfaction guaranteed!

Helium Leak Detector (HELIOT Series)

The HELIOT900 is our helium leak detector with; high speed pumping capability, user-friendly operation and guaranteed top performance in all kinds of leak testing situations.

Helium Leak Detector (HELIOT Series)
RF Power Supply
DC Power Supply

Power Supply

Power Generator ‘s ULVAC offers a variety of electronic guns and power supplies that support evaporation deposition technology.

Process Gas Monitor (RGA)

“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.

Process Gas Monitor
Oil Mistrap
Vacuum Oil

Optional Parts

When the vacuum pump oil is operated over a long period of time, its deterioration contributes to poor performance. Regularly check to see if the oil has decreased or if it is dirty and refill or replace it.