Vacuum technology is essential for diverse industries. As a comprehensive manufacturer of vacuum components supporting industrial infrastructure, we offer an extensive lineup of vacuum components.
Bringing our comprehensive capabilities into full play, we will develop business from both aspects of regions and industrial fields in an aim to become a driving force of ULVAC’s global business.
ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
ULVAC vacuum gauges have been developed based on rich experience and technology in the vacuum field. From Pirani vacuum gauges to ionization vacuum gauges and ultra high vacuum gauges, in other words, from atmospheric pressure to ultra-high vacuum (10-12 Pa), we have a lineup of vacuum gauges for all industrial areas, measurement conditions, and applications.
The HELIOT900 is our helium leak detector with; high speed pumping capability, user-friendly operation and guaranteed top performance in all kinds of leak testing situations.
“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.