Vacuum Pump

ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.

Dry Vacuum Pump 

Dry Vacuum Pump LS Series
Pumping Speed (L/min): 2,000~16,666 
Ultimate Pressure (Pa): 0.6 ~ 2.7

Dry Vacuum Pump LR/HR Series
Pumping Speed (L/min): 1,030 ~ 53,333
Ultimate Pressure (Pa): 5.0 ~ 6.7x10-1

Dry Vacuum Pump ECO-SHOCK Series
Pumping Speed (L/min): 1,333 ~ 3,950

Small Dry Vacuum Pump DAT Series
Pumping Speed (L/min): 20 ~ 240
Ultimate Pressure (Pa): 3.3x103 ~ 13.3x103

Small Dry Vacuum Pump DTC Series
Pumping Speed (L/min): 20 ~ 120
Ultimate Pressure (Pa): 1.0x103

Small Dry Vacuum Pump DSB Series
Pumping Speed (L/min): 167 ~ 667
Ultimate Pressure (Pa):12.0x10~ 15.0x103

Small Dry Vacuum Pump DIS/DISL Series
Pumping Speed (L/min): 90 ~ 430
Ultimate Pressure (Pa): 5.0 ~ 30.0

Dry Vacuum Pump GR Series
Pumping Speed (L/min): 1,030 ~ 3,100
Ultimate Pressure (Pa): 5.0

Dry Vacuum Pump CR Series
Pumping Speed (L/min): 280~5,000
Ultimate Pressure (Pa): 0.5~3

Small Dry Vacuum Pump RDA Series
Pumping Speed (L/min): 280
Ultimate Pressure (Pa): ≦8.0×10-2(≦6.0)

Small Dry Vacuum Pump DA Series
Pumping Speed (L/min): 20 ~ 240
Ultimate Pressure (Pa): 5.33x103 ~ 16.0x103

Small Dry Vacuum Pump DAU/DTU Series
Pumping Speed (L/min): 20 ~ 100
Ultimate Pressure (Pa): 200 ~ 266

Small Dry Vacuum Pump DOP Series
Pumping Speed (L/min): 40 ~ 420
Ultimate Pressure (Pa):1.2x10~ 17.3x103

Portable Aspirator MDA Series
Pumping Speed (L/min): 12
Ultimate Pressure (Pa): 6.6×103

Oil Rotary Vacuum Pump 

Oil Rotary Vacuum Pump VS650A/VS750A Series
Pumping Speed (L/min): 10,833 ~ 12,500
Ultimate Pressure (Pa): 8 

Oil Rotary Vacuum Pump VS / VSN Series
Pumping Speed (L/min): 150 ~ 240
Ultimate Pressure (Pa): 5.3 

Oil Rotary Vacuum Pump PKS Series
Pumping Speed (L/min): 1,600 ~ 7,000
Ultimate Pressure (Pa): 2.7

Small Oil Rotary Vacuum Pump GHD Series
Pumping Speed (L/min): 30 ~ 100
Ultimate Pressure (Pa): 0.67

Small Oil Rotary Vacuum Pump GCD Series
Pumping Speed (L/min): 40 ~ 280
Ultimate Pressure (Pa): 0.67

Oil Rotary Vacuum Pump VD / VDN Series
Pumping Speed (L/min): 240 ~ 1,500
Ultimate Pressure (Pa): 0.67 

Oil Rotary Vacuum Pump PVD / PVD-N Series
Pumping Speed (L/min): 155 ~ 310
Ultimate Pressure (Pa): 0.67

Small Oil Rotary Vacuum Pump G Series
Pumping Speed (L/min): 100
Ultimate Pressure (Pa): 0.67

Small Oil Rotary Vacuum Pump GLD Series
Pumping Speed (L/min): 40 ~ 280
Ultimate Pressure (Pa): 0.67

Mechanical Booster Pump

Small Mechanical Booster Pump MBS Series
Pumping Speed (L/min): 833
Ultimate Pressure (Pa): 4.0X10-2

Mechanical Booster Pump PRC Series
Pumping Speed (L/min): 4,670 ~ 25,000
Ultimate Pressure (Pa): 0.4 ~ 0.67

Mechanical Booster Pump PMB Series
Pumping Speed (L/min): 1,580 ~ 41,667
Ultimate Pressure (Pa): 0.4 ~ 7.5

Mechanical Booster Pump PMB-C Series
Pumping Speed (L/min): 63,300 ~ 103,300
Ultimate Pressure (Pa): 0.67

Oil Diffusion Pump

Oli Diffusion Pump ULK Series
Pumping Speed (L/sec): 550 ~5,400
Ultimate Pressure (Pa): <2.6x10-5

Oli Diffusion Pump PBL Series
Pumping Speed (L/sec): 80 ~ 7,000
Ultimate Pressure (Pa): 2.7x10-2

Oil Diffusion Pump PFL Series
Pumping Speed (L/sec): 10,000 ~ 70,000
Ultimate Pressure (Pa): 3.0x10-4

Turbo Molecular Pump

Turbo Molecular Pump UTM-MI Series
Pumping Speed (L/sec):
N2 = 1,030 ~ 3,200
Ar  =  980 ~ 3,100
H2 = 660 ~ 2,100
Ultimate Pressure (Pa): 10-7

Turbo Molecular Pump UTM-B Series
Pumping Speed (L/sec):
N2 = 70 ~ 280
He = 60 ~ 270
H2 = 49 ~ 220

Turbo Molecular Pumping System Desktop YTP
Pumping Speed (L/sec):
N2 = 70 / He = 60 / H2 = 49
Ultimate Pressure (Pa): 10-6

Turbo Molecular Pump System YTP Series
Pumping Speed N2 (L/sec): 190 ~ 550
Ultimate Pressure (Pa):10-8 

Turbo Molecular Pump + Dry Vacuum Pump VPT-060
Pumping Speed  (L/sec): 60
Ultimate Pressure (Pa):10-5 

CRYO Pump

CRYO Pump
Pumping Speed (L/sec):
N2 = 450 ~ 28,000
H2 = 500 ~ 43,000
Ar = 370 ~ 23,000
H2O = 1,100 ~ 70,000
Ultimate Pressure (Pa): 10-7 

CRYO Cooler
Ultimate Temperature : 2.7K ~ 40K

Ion Pump

Sputter Ion Pump PST Series
Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.

Ion Pump Control GST-07L-B
Operating pressure : 10-2 to 10-4Pa or low