Vacuum Pump

ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. In addition to Oil Rotary Vacuum Pumps, Dry Vacuum Pumps also have a lineup for all areas, conditions, and applications, including Roots, Diaphragms, Pistons,Turbo Molecular Pumps, and Cryopumps.

Dry Vacuum Pump

Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series

Pumping Speed (L/min): 6~ 240 Ultimate Pressure (Pa): 6.65×103 ~16.0×103 

DAU/DTU Series

Pumping Speed (L/min): 20 Ultimate Pressure (Pa): 200  

DTC Series

Pumping Speed (L/min): 20-60 Ultimate Pressure (Pa): 1.0×103

Rocking Piston Type Dry Vacuum Pump

DOP Series

Pumping Speed (L/min): 40 ~ 420 Ultimate Pressure (Pa): 6.65×103 ~16.0×103 

Scroll Type Dry Vacuum Pump

DIS/DISL Series

Pumping Speed (L/min): 90 ~ 430 Ultimate Pressure (Pa): 5.0 ~ 30.0

Portable Aspirator

MDA-015A Series

Pumping Speed (L/min): 15 Ultimate Pressure (Pa): 6.6×103

Multi-Stage Roots Type Dry Vacuum Pump

RDA Series

Pumping Speed (L/min): 280 ~ 500 Ultimate Pressure (Pa): ≦8.0×10-2(≦6.0)

GR Series

Pumping Speed (L/min): 1,030 ~ 3,100 Ultimate Pressure (Pa): 5.0

LR/HR/UR Series

Pumping Speed (L/min): 62 ~ 440 Ultimate Pressure (Pa): 5.0

CR Series

Pumping Speed (L/min): 16 ~ 300 Ultimate Pressure (Pa): ≦3.0

Oil Rotary Vacuum Pump

VD Series

Pumping Speed (L/min): 240 ~ 1,500 Ultimate Pressure (Pa): 0.67

VS650A/750A Series

Pumping Speed (L/min): 10,833 ~ 12,500 Ultimate Pressure (Pa): 8

GLD Series

Pumping Speed (L/min): 40 ~ 280 Ultimate Pressure (Pa): 0.67

VS Series

Pumping Speed (L/min): 150 ~ 240 Ultimate Pressure (Pa): 5.3

G Series

Pumping Speed (L/min): 100 Ultimate Pressure (Pa): 0.67

GCD Series

Pumping Speed (L/min): 40 ~ 280 Ultimate Pressure (Pa): 0.67

PKS Series

Pumping Speed (L/min): 1,600 ~ 7,000 Ultimate Pressure (Pa): 2.7

GHD Series

Pumping Speed (L/min): 30 ~ 100 Ultimate Pressure (Pa): 0.67

Mechanical Booster Pump

MBS Series

Pumping Speed (L/min): 50 Ultimate Pressure (Pa): 4.0×10-2

PMB-C Series

Pumping Speed (L/min):
63,330 ~ 103,300
Ultimate Pressure (Pa):
9.3×10~ 2.0×103/8.0×102 

PMB-D Series

Pumping Speed (L/min): 1,580~41,667 Ultimate Pressure (Pa):
9.3×10~ 2.0×103/8.0×102 

PRC Series

Pumping Speed (L/min):
4,670~25,000
Ultimate Pressure (Pa):
1.2 x 10

Oil Diffusion Pump

PBL Series

Pumping Speed (L/sec): 80~7,000 Ultimate Pressure (Pa): 2.7×10-2

PFL Series

Pumping Speed (L/Sec):
10,000 ~ 70,000
Ultimate Pressure (Pa): 2.7×10-2

ULK Series

Pumping Speed (L/Sec):
550~4,900
Ultimate Pressure (Pa):
1.2 x 10

Turbo Molecular Pump

UTM-FW Series

Pumping Speed (L/sec):
N2=350 ~ 1,000
H2= 320 ~ 570
Ultimate Pressure (Pa): 10-7

UTM-B Series

Pumping Speed (L/sec):
N2=70 ~ 280
H2= 60 ~ 270
Ar= 49~ 220
Ultimate Pressure (Pa):
10-6

UTM-FH Series

Pumping Speed (L/sec):
N2=350 ~ 3,300
H2= 320 ~ 2,400
Ultimate Pressure (Pa): 10-8

UTM-MI Series

Pumping Speed (L/sec):
N2=1,030 ~ 3,200
H2= 980 ~ 3,100
Ar= 660 ~ 2,100
Ultimate Pressure (Pa):
10-8

YTP Series

Pumping Speed (L/sec):
N2= 70~280
H2= 49~220
Ultimate Pressure (Pa): 10-6

Desktop YTP Series

Pumping Speed (L/sec):
N2=70
He = 60
H2= 49
Ultimate Pressure (Pa): 10-6

CRYO Pump

CRYO-U Series

Pumping Speed (L/sec):
2,100 ~ 70,000
Ultimate Pressure (Pa):
1.1×10
2~ 7.4×102