Vacuum Pump

The superior pumping performance of ULVAC's vacuum pumps has earned them an excellent reputation among many users.Various ULVAC vacuum pumps are shown based on operating pressure range. (Operating pressure range varies depending on the model.)

Dry Vacuum Pump 

ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.


Dry Vacuum Pump LS Series
Pumping Speed (L/min): 2,000~16,666 
Ultimate Pressure (Pa): 0.6 ~ 2.7

 

Dry Vacuum Pump LR/HR Series
Pumping Speed (L/min): 1,030 ~ 53,333
Ultimate Pressure (Pa): 5.0 ~ 6.7x10-1

 

Dry Vacuum Pump ECO-SHOCK Series
Pumping Speed (L/min): 1,333 ~ 3,950


Small Dry Vacuum Pump DAT Series
Pumping Speed (L/min): 20 ~ 240
Ultimate Pressure (Pa): 3.3x103 ~ 13.3x103


Small Dry Vacuum Pump DTC Series
Pumping Speed (L/min): 20 ~ 120
Ultimate Pressure (Pa): 1.0x103


Small Dry Vacuum Pump DSB Series
Pumping Speed (L/min): 167 ~ 667
Ultimate Pressure (Pa):12.0x10~ 15.0x103


Dry Vacuum Pump GR Series
Pumping Speed (L/min): 1,030 ~ 3,100
Ultimate Pressure (Pa): 5.0


Dry Vacuum Pump CR Series
Pumping Speed (L/min): 280~5,000
Ultimate Pressure (Pa): 0.5~3


Small Dry Vacuum Pump DA Series
Pumping Speed (L/min): 20 ~ 240
Ultimate Pressure (Pa): 5.33x103 ~ 16.0x103


Small Dry Vacuum Pump DAU/DTU Series
Pumping Speed (L/min): 20 ~ 100
Ultimate Pressure (Pa): 200 ~ 266


Small Dry Vacuum Pump DOP Series
Pumping Speed (L/min): 40 ~ 420
Ultimate Pressure (Pa):1.2x10~ 17.3x103


Small Dry Vacuum Pump
DIS/DISL Series

Pumping Speed (L/min): 90 ~ 430
Ultimate Pressure (Pa): 5.0 ~ 30.0

Oil Rotary Vacuum Pump 


Oil Rotary Vacuum Pump
VS650A/VS750A Series
Pumping Speed (L/min): 10,833 ~ 12,500
Ultimate Pressure (Pa): 8 


Oil Rotary Vacuum Pump
VS / VSN Series
Pumping Speed (L/min): 150 ~ 240
Ultimate Pressure (Pa): 5.3 


Oil Rotary Vacuum Pump
PKS Series
Pumping Speed (L/min): 1,600 ~ 7,000
Ultimate Pressure (Pa): 2.7


Small Oil Rotary Vacuum Pump
GHD Series
Pumping Speed (L/min): 30 ~ 100
Ultimate Pressure (Pa): 0.67


Small Oil Rotary Vacuum Pump
GCD Series
Pumping Speed (L/min): 40 ~ 280
Ultimate Pressure (Pa): 0.67


Oil Rotary Vacuum Pump
VD / VDN Series
Pumping Speed (L/min): 240 ~ 1,500
Ultimate Pressure (Pa): 0.67 


Oil Rotary Vacuum Pump
PVD / PVD-N Series
Pumping Speed (L/min): 155 ~ 310
Ultimate Pressure (Pa): 0.67


Small Oil Rotary Vacuum Pump
G Series
Pumping Speed (L/min): 100
Ultimate Pressure (Pa): 0.67


Small Oil Rotary Vacuum Pump
GLD Series
Pumping Speed (L/min): 40 ~ 280
Ultimate Pressure (Pa): 0.67

Mechanical Booster Pump


Small Mechanical Booster Pump
MBS Series
Pumping Speed (L/min): 833
Ultimate Pressure (Pa): 4.0X10-2


Mechanical Booster Pump
PRC Series
Pumping Speed (L/min): 4,670 ~ 25,000
Ultimate Pressure (Pa): 0.4 ~ 0.67


Mechanical Booster Pump
PMB Series
Pumping Speed (L/min): 1,580 ~ 41,667
Ultimate Pressure (Pa): 0.4 ~ 7.5


Mechanical Booster Pump
PMB-C Series
Pumping Speed (L/min): 63,300 ~ 103,300
Ultimate Pressure (Pa): 0.67

Oil Diffusion Pump


Oli Diffusion Pump ULK Series
Pumping Speed (L/sec): 550 ~5,400
Ultimate Pressure (Pa): <2.6x10-5


Oli Diffusion Pump PBL Series
Pumping Speed (L/sec): 80 ~ 7,000
Ultimate Pressure (Pa): 2.7x10-2


Oli Diffusion Pump PFL Series
Pumping Speed (L/sec): 10,000 ~ 70,000
Ultimate Pressure (Pa): 3.0x10-4

Turbo Molecular Pump


Turbo Molecular Pump
Ceramic Ball Bearing Type
UTM70B
Pumping Speed (L/sec): 280
Ultimate Pressure (Pa): 10-8

Turbo Molecular Pump 
UTM-MI Series
Pumping Speed (L/sec):
N2 = 1,030 ~ 3,200
Ar  =  980 ~ 3,100
H2 = 660 ~ 2,100
Ultimate Pressure (Pa): 10-7


Turbo Molecular Pump
Pivot Bearing Type UTM Series
Pumping Speed N2 (L/sec): 50 ~ 550
Ultimate Pressure (Pa):10-8 ~ 10-7 


Digitally-Controlled Magnetic
Levitation Turbo Molecular Pump 
UTM-FH/FW Series
 


Turbo Molecular Pumping System
Desktop YTP
Pumping Speed (L/sec):
N2 = 70 / He = 60 / H2 = 49
Ultimate Pressure (Pa): 10-6

Turbo Molecular Pump
Ceramic Ball Bearing Type UTM300B
Pumping Speed (L/sec):
N2 = 280
He = 270
H2 = 220


Turbo Molecular Pump System
YTP Series
Pumping Speed N2 (L/sec): 190 ~ 550
Ultimate Pressure (Pa):10-8 

CRYO Pump

CRYO Pump
Pumping Speed (L/sec):
N2 = 450 ~ 28,000
H2 = 500 ~ 43,000
Ar = 370 ~ 23,000
H2O = 1,100 ~ 70,000
Ultimate Pressure (Pa): 10-7 


CRYO Cooler
Ultimate Temperature : 2.7K ~ 40K

Ion Pump


 Sputter Ion Pump PST-030CU/AU 

Evacuation speed to 1 x 10-7Pa :
N2 = 0.03m3/s(CU · AU) 0.02m3/s(at 1x10-7Pa)
Ultimate Pressure (Pa): 10-9

 


Acter Pumps PST-100CX/100AX
Evacuation speed to 1 x 10-7Pa :
N2 = 0.10m3/s(CX · AX) 0.08m3/s(at 1 x 10-7Pa)
Ultimate Pressure (Pa): 10-9


Acter Pumps PST-400CX2/400AX2
Evacuation speed to 1 x 10-7Pa :
N2 =0.36m3/s(CX2 · AX2)
Ar = 0.04m3/s(CX2)   0.19m3/s(AX2)
Ultimate Pressure (Pa): 10-10


Acter Pumps PST-050CU/AU
Evacuation speed to 1 x 10-7Pa :
N2 =0.045m3/s(CU · AU) 0.03m3/s(at 1 x 10-7Pa)
Ultimate Temperature :10-9


Acter Pumps PST-200CX2/200AX2
Evacuation speed to 1 x 10-7Pa :
N2 = 0.20m3/s(CX2 · AX2)
Ar =  0.02m3/s(CX2)   0.105m3/s(AX2)
Ultimate Pressure (Pa): 10-9


Ion Pump Control GST-07L-B
Operating pressure : 10-2 to 10-4Pa or lower

Titanium Getter Pump


Titanium Getter Pump GGT-3, PGT Series

Pumping Speed (Pa) : 24m3/(s·m2) <20ºC> /
64m3/(s·m2) <-196ºC>

Vacuum Pumping System

vacuum Pumping system

Vacuum Pumping System YMV Series
YMV series is a frame unit for combining a mechanical booster pump and an oil rotary vacuum pump. 

vacuum Pumping system

Vacuum Pumping System YMV Series
YMV series is a frame unit for combining a mechanical booster pump and an oil rotary vacuum pump.