Vacuum Pump

ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.

Dry Vacuum Pump 


Dry Vacuum Pump LS Series
Pumping Speed (L/min): 2,000~16,666 
Ultimate Pressure (Pa): 0.6 ~ 2.7

 

Dry Vacuum Pump LR/HR Series
Pumping Speed (L/min): 1,030 ~ 53,333
Ultimate Pressure (Pa): 5.0 ~ 6.7x10-1

 

Dry Vacuum Pump ECO-SHOCK Series
Pumping Speed (L/min): 1,333 ~ 3,950


Small Dry Vacuum Pump DAT Series
Pumping Speed (L/min): 20 ~ 240
Ultimate Pressure (Pa): 3.3x103 ~ 13.3x103


Small Dry Vacuum Pump DTC Series
Pumping Speed (L/min): 20 ~ 120
Ultimate Pressure (Pa): 1.0x103


Small Dry Vacuum Pump DSB Series
Pumping Speed (L/min): 167 ~ 667
Ultimate Pressure (Pa):12.0x103 ~ 15.0x103


Dry Vacuum Pump GR Series
Pumping Speed (L/min): 1,030 ~ 3,100
Ultimate Pressure (Pa): 5.0


Dry Vacuum Pump CR Series
Pumping Speed (L/min): 280~5,000
Ultimate Pressure (Pa): 0.5~3


Small Dry Vacuum Pump DA Series
Pumping Speed (L/min): 20 ~ 240
Ultimate Pressure (Pa): 5.33x103 ~ 16.0x103


Small Dry Vacuum Pump DAU/DTU Series
Pumping Speed (L/min): 20 ~ 100
Ultimate Pressure (Pa): 200 ~ 266


Small Dry Vacuum Pump DOP Series
Pumping Speed (L/min): 40 ~ 420
Ultimate Pressure (Pa):1.2x103 ~ 17.3x103


Small Dry Vacuum Pump
DIS/DISL Series
Pumping Speed (L/min): 90 ~ 430
Ultimate Pressure (Pa): 5.0 ~ 30.0

Oil Rotary Vacuum Pump 


Oil Rotary Vacuum Pump
VS650A/VS750A Series
Pumping Speed (L/min): 10,833 ~ 12,500
Ultimate Pressure (Pa): 8 


Oil Rotary Vacuum Pump
VS / VSN Series
Pumping Speed (L/min): 150 ~ 240
Ultimate Pressure (Pa): 5.3 


Oil Rotary Vacuum Pump
PKS Series
Pumping Speed (L/min): 1,600 ~ 7,000
Ultimate Pressure (Pa): 2.7


Small Oil Rotary Vacuum Pump
GHD Series
Pumping Speed (L/min): 30 ~ 100
Ultimate Pressure (Pa): 0.67


Small Oil Rotary Vacuum Pump
GCD Series
Pumping Speed (L/min): 40 ~ 280
Ultimate Pressure (Pa): 0.67


Oil Rotary Vacuum Pump
VD / VDN Series
Pumping Speed (L/min): 240 ~ 1,500
Ultimate Pressure (Pa): 0.67 


Oil Rotary Vacuum Pump
PVD / PVD-N Series
Pumping Speed (L/min): 155 ~ 310
Ultimate Pressure (Pa): 0.67


Small Oil Rotary Vacuum Pump
G Series
Pumping Speed (L/min): 100
Ultimate Pressure (Pa): 0.67


Small Oil Rotary Vacuum Pump
GLD Series
Pumping Speed (L/min): 40 ~ 280
Ultimate Pressure (Pa): 0.67

Mechanical Booster Pump


Small Mechanical Booster Pump
MBS Series
Pumping Speed (L/min): 833
Ultimate Pressure (Pa): 4.0X10-2


Mechanical Booster Pump
PRC Series
Pumping Speed (L/min): 4,670 ~ 25,000
Ultimate Pressure (Pa): 0.4 ~ 0.67


Mechanical Booster Pump
PMB Series
Pumping Speed (L/min): 1,580 ~ 41,667
Ultimate Pressure (Pa): 0.4 ~ 7.5


Mechanical Booster Pump
PMB-C Series
Pumping Speed (L/min): 63,300 ~ 103,300
Ultimate Pressure (Pa): 0.67

Oil Diffusion Pump


Oli Diffusion Pump ULK Series
Pumping Speed (L/sec): 550 ~5,400
Ultimate Pressure (Pa): <2.6x10-5


Oli Diffusion Pump PBL Series
Pumping Speed (L/sec): 80 ~ 7,000
Ultimate Pressure (Pa): 2.7x10-2


Oli Diffusion Pump PFL Series
Pumping Speed (L/sec): 10,000 ~ 70,000
Ultimate Pressure (Pa): 3.0x10-4

Turbo Molecular Pump


Turbo Molecular Pump
Ceramic Ball Bearing Type
UTM70B
Pumping Speed (L/sec): 280
Ultimate Pressure (Pa): 10-8

Turbo Molecular Pump 
UTM-MI Series
Pumping Speed (L/sec):
N2 = 1,030 ~ 3,200
Ar  =  980 ~ 3,100
H2 = 660 ~ 2,100
Ultimate Pressure (Pa): 10-7


Turbo Molecular Pump
Pivot Bearing Type UTM Series
Pumping Speed N2 (L/sec): 50 ~ 550
Ultimate Pressure (Pa):10-8 ~ 10-7 


Digitally-Controlled Magnetic
Levitation Turbo Molecular Pump 
UTM-FH/FW Series
 


Turbo Molecular Pumping System
Desktop YTP
Pumping Speed (L/sec):
N2 = 70 / He = 60 / H2 = 49
Ultimate Pressure (Pa): 10-6

Turbo Molecular Pump
Ceramic Ball Bearing Type UTM300B
Pumping Speed (L/sec):
N2 = 280
He = 270
H2 = 220


Turbo Molecular Pump System
YTP Series
Pumping Speed N2 (L/sec): 190 ~ 550
Ultimate Pressure (Pa):10-8 

CRYO Pump

CRYO Pump
Pumping Speed (L/sec):
N2 = 450 ~ 28,000
H2 = 500 ~ 43,000
Ar = 370 ~ 23,000
H2O = 1,100 ~ 70,000
Ultimate Pressure (Pa): 10-7 


CRYO Cooler
Ultimate Temperature : 2.7K ~ 40K

Ion Pump


 Sputter Ion Pump PST-030CU/AU 
Evacuation speed to 1 x 10-7Pa :
N2 = 0.03m3/s(CU · AU) 0.02m3/s(at 1x10-7Pa)
Ultimate Pressure (Pa): 10-9

 


Acter Pumps PST-100CX/100AX
Evacuation speed to 1 x 10-7Pa :
N2 = 0.10m3/s(CX · AX) 0.08m3/s(at 1 x 10-7Pa)
Ultimate Pressure (Pa): 10-9


Acter Pumps PST-400CX2/400AX2
Evacuation speed to 1 x 10-7Pa :
N2 =0.36m3/s(CX2 · AX2)
Ar = 0.04m3/s(CX2)   0.19m3/s(AX2)
Ultimate Pressure (Pa): 10-10


Acter Pumps PST-050CU/AU
Evacuation speed to 1 x 10-7Pa :
N2 =0.045m3/s(CU · AU) 0.03m3/s(at 1 x 10-7Pa)
Ultimate Temperature :10-9


Acter Pumps PST-200CX2/200AX2
Evacuation speed to 1 x 10-7Pa :
N2 = 0.20m3/s(CX2 · AX2)
Ar =  0.02m3/s(CX2)   0.105m3/s(AX2)
Ultimate Pressure (Pa): 10-9


Ion Pump Control GST-07L-B
Operating pressure : 10-2 to 10-4Pa or lower

Titanium Getter Pump


Titanium Getter Pump GGT-3, PGT Series
Pumping Speed (Pa) : 24m3/(s·m2) <20ºC> /
64m3/(s·m2) <-196ºC>