The superior pumping performance of ULVAC's vacuum pumps has earned them an excellent reputation among many users.Various ULVAC vacuum pumps are shown based on operating pressure range. (Operating pressure range varies depending on the model.)
ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
Oil Rotary Vacuum Pump
VD / VDN Series
Pumping Speed (L/min): 240 ~ 1,500
Ultimate Pressure (Pa): 0.67