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ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. In addition to Oil Rotary Vacuum Pumps, Dry Vacuum Pumps also have a lineup for all areas, conditions, and applications, including Roots, Diaphragms, Pistons,Turbo Molecular Pumps, and Cryopumps.
Pumping Speed (L/min): 6~ 240 Ultimate Pressure (Pa): 6.65×103 ~16.0×103
Pumping Speed (L/min): 20 Ultimate Pressure (Pa): 200
Pumping Speed (L/min): 20-60 Ultimate Pressure (Pa): 1.0×103
Pumping Speed (L/min): 280 ~ 500 Ultimate Pressure (Pa): ≦8.0×10-2（≦6.0）
Pumping Speed (L/min): 1,030 ~ 3,100 Ultimate Pressure (Pa): 5.0
Pumping Speed (L/min): 62 ~ 440 Ultimate Pressure (Pa): 5.0
Pumping Speed (L/min): 16 ~ 300 Ultimate Pressure (Pa): ≦3.0
Pumping Speed (L/min): 240 ~ 1,500 Ultimate Pressure (Pa): 0.67
Pumping Speed (L/min): 10,833 ~ 12,500 Ultimate Pressure (Pa): 8
Pumping Speed (L/min): 40 ~ 280 Ultimate Pressure (Pa): 0.67
Pumping Speed (L/min): 150 ~ 240 Ultimate Pressure (Pa): 5.3
Pumping Speed (L/min): 100 Ultimate Pressure (Pa): 0.67
Pumping Speed (L/min): 40 ~ 280 Ultimate Pressure (Pa): 0.67
Pumping Speed (L/min): 1,600 ~ 7,000 Ultimate Pressure (Pa): 2.7
Pumping Speed (L/min): 30 ~ 100 Ultimate Pressure (Pa): 0.67
Pumping Speed (L/min): 50 Ultimate Pressure (Pa): 4.0×10-2
Pumping Speed (L/min):
63,330 ~ 103,300
Ultimate Pressure (Pa):
9.3×103 ~ 2.0×103/8.0×102
Pumping Speed (L/min): 1,580~41,667
Ultimate Pressure (Pa):
9.3×103 ~ 2.0×103/8.0×102
Pumping Speed (L/min):
4,670~25,000
Ultimate Pressure (Pa):
1.2 x 103
Pumping Speed (L/sec): 80~7,000 Ultimate Pressure (Pa): 2.7×10-2
Pumping Speed (L/Sec):
10,000 ~ 70,000
Ultimate Pressure (Pa): 2.7×10-2
Pumping Speed (L/Sec):
550~4,900
Ultimate Pressure (Pa):
1.2 x 103
Pumping Speed (L/sec):
N2=350 ~ 1,000
H2= 320 ~ 570
Ultimate Pressure (Pa): 10-7
Pumping Speed (L/sec):
N2=70 ~ 280
H2= 60 ~ 270
Ar= 49~ 220
Ultimate Pressure (Pa): 10-6
Pumping Speed (L/sec):
N2=350 ~ 3,300
H2= 320 ~ 2,400
Ultimate Pressure (Pa): 10-8
Pumping Speed (L/sec):
N2=1,030 ~ 3,200
H2= 980 ~ 3,100
Ar= 660 ~ 2,100
Ultimate Pressure (Pa): 10-8
Pumping Speed (L/sec):
N2= 70~280
H2= 49~220
Ultimate Pressure (Pa): 10-6
Pumping Speed (L/sec):
N2=70
He = 60
H2= 49
Ultimate Pressure (Pa): 10-6
