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Smartphone-Direct Pirani Gauge
SWU10 - U
No dedicated power supply and display is required!
Pirani gauge that can be connected directly to a smartphone.
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RF Power Supply / Matching box
RFS-N Series
The RFS-N Series of RF power generators for plasma processes are
available at 13.56MHz with 0.5kW, 1kW, 3kW, or 5kW output.
Vacuum Furnaces
Vacuum Furnace System Batch Type
COMBAT series are used for various purpose such as quenching
and brazing of various metals.
Steady Method Thermal Conductivity Measurement System
GH-1 Series
Thermal conductivity evaluations of polymers and glass.
A heat-flow method Steady Method Thermal Conductivity
Measurement System that complies with the US ASTM E1530 standard.
This system measures comparatively low-thermal conductivity materials over
a temperature range of 50 to 280℃.and brazing of various metals.
Rapid Multi Property Measurement System
RMP-1 Series
Heating up to 3000K within one second!
This system measures thermophysical properties
by applying current directly to a sample to heat up to
higher temperature within one second.
Measurable standard properties are electrical resistivity,
total emissivity, specific heat capacity,
thermal expansion rate and thermal diffusivity.
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Basic Corporate Philosophy

ULVAC Group aims to contribute to the development of industries and science by comprehensively utilizing its vacuum and peripheral technologies through the mutual cooperation and collaboration of the Group companies.

Our Product

Vacuum Components

ULVAC, as a general manufacturer of vacuum equipment, also focuses energy on the development of components in order to offer a wide-range component lineup. ULVAC delivers all types of products ranging from components such as vacuum valves, flanges, and terminals, to vacuum pumps and measurement and analysis equipment.

Vacuum Equipments

ULVAC's base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.


R&D Equipment

Innovative and advanced vacuum technologies to blaze a trail for the
future. ULVAC has been providing all kinds of industries with vacuum
technology based products and materials essential for them under
the basic managerial philosophy of "aiming at contributing to the
evolution of industries and sciences by using vacuum technologies
and all peripheral technologies.

Customer Service

ULVAC does not just offer vacuum equipment. ULVAC and our group companies together offer a comprehensive range of services through “ULVAC CS Solutions” that ensure high quality customer service. From initial set-up and operation, field service, analysis, material and parts supply, to vacuum pump maintenance.

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