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Smartphone-Direct Pirani Gauge
SWU10 - U
No dedicated power supply and display is required!
Pirani gauge that can be connected directly to a smartphone.
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RF Power Supply / Matching box
RFS-N Series
The RFS-N Series of RF power generators for plasma processes are
available at 13.56MHz with 0.5kW, 1kW, 3kW, or 5kW output.
Vacuum Furnaces
Vacuum Furnace System Batch Type
COMBAT series are used for various purpose such as quenching
and brazing of various metals.
Steady Method Thermal Conductivity Measurement System
GH-1 Series
Thermal conductivity evaluations of polymers and glass.
A heat-flow method Steady Method Thermal Conductivity
Measurement System that complies with the US ASTM E1530 standard.
This system measures comparatively low-thermal conductivity materials over
a temperature range of 50 to 280℃.and brazing of various metals.
Rapid Multi Property Measurement System
RMP-1 Series
Heating up to 3000K within one second!
This system measures thermophysical properties
by applying current directly to a sample to heat up to
higher temperature within one second.
Measurable standard properties are electrical resistivity,
total emissivity, specific heat capacity,
thermal expansion rate and thermal diffusivity.
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ULVAC is a world leader in Vacuum euipment and vacuum component used in the semiconductors,electronic devices,automotive parts. Which more than 15 Years experience in Vacuum Technology business in THAILAND and more than 69 years around the world.

Our Business

ULVAC, as a general manufacturer of vacuum equipment, also focuses energy on the development of components in order to offer a wide-range component lineup. ULVAC delivers all types of products ranging from components such as vacuum valves, flanges, and terminals, to vacuum pumps and measurement and analysis equipment.


Automatic Helium Leak Testing System

Vacuum Furnace System


Vacuum Evaporation System

Vacuum Cooling System

Refrigerant Charging Machine

Vacuum Dehydration Furnace System

ULVAC’s base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.

Our support

     Our customer support division consists of trained engineers/technicians capable of providing a full service for many kinds of vacuum equipments and vacuum systems including annual overhaul, maintenance, repair and refurbishment services.
     Our engineers are fully trained to carry out servicing and repairs for all types of vacuum pumps. We can service not only ULVAC pumps but also pumps by other manufacturers.

ULVAC offers complete installation service. 
We are able to install many kinds of
vacuum systems such as Sputtering, evaporator,
leak test systems and so on. We provide a complete
installation service, including system  control
and training course for customer’s staffs.

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In ULVAC, we provide Part Cleaning and Target Bonding services for a wide range of vacuum equipment and systems. ULVAC Thailand has collaboration with ULVAC Materials,Inc.
to provide sputtering targets to meet each individual customer’s requirements.In addition, ULVAC provides surface treatment onto the shields surface to increase product life expectancy and 
particle reduction. Sampling evaluation is also available upon request.

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