Power Generator ‘s ULVAC offers a variety of electronic guns and power supplies that support evaporation deposition technology.
DC power supply designed for sputtering system. It has high versatility and reliability based on our nowhow including application. Our DC power supply lineup has various features.
As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications. Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.