A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.
Features
- It is a completely dry exhaust unit.
- The Setup space is compact.
Specification
|
Model
|
VPT-060 |
|
Ultimate pressure
|
10-5 Pa |
| Main pump | Turbo molecular pump（air cooling）60Ｌ/sec |
| Backing pump | Diaphragm type vacuum pump 20 L/min |
| Inlet flange | ISO63（Option：KF-40） |
| Weight | 17kg |
| External dimensions （W×D×H） | 340mm(W)×340mm(D)×355mm(H) |
|
※Ionization vacuum gauge ? Pirani vacuum gauge are options.
※Depending on the conditions of use, performance may be degraded. |
Utility
|
Model
|
VPT-060 |
|
Power required
|
Single phase 100Ｖ 0.3kVA |
|
Ground terminal
|
D grade （ground resistance/100MΩ or less） |
|
Connection
|
Vinyl cabtyre cable (with a plug) 2m |
Dimension drawing
Exhaust System Drawing
Optional parts
