Model: SP1

Model: SP1

Pirani Vacuum Gauge

The sensor unit SP1 is an integrated pirani gauge consisting of the "Model:WP"sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).

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Features

  • Transducer type that saves cost and space
  • Easy replacement of sensor head
  • Platinum filament which has excellent corrosion resistance
  • Sensor heads you have been using (WP-01, 02, 03, 16) can be used as is.
  • Set-point output 2 points
  • Measurement value output DC 0 to 5V (non-linear)
  • Power supply voltage DC24V

Applications

  • Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
  • Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
  • Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

Specifications

Type Sensor unit
Model SP1
Compatible sensor head WP-01, WP-02, WP-03, WP-16

Accuracy

 

 ±15 %（51 Pa -760 Pa）
±30 %（10 Pa -1000 Pa）
±50 %（0.4 Pa -3000 Pa）
Operating temperature range 10 - 40℃
Measurement value output Nonlinear output: 0 to 5VDC (Max. 10V)
Setpoint 1/2 Pressure setting adjustment monitor Nonlinear output: 0 to 5VDC (Max. 10V)
Control output signal Open collector output, Negative logic
ERROR signal
Setpoint 1/2
LED display Power, error, set point 1, set point 2
Power supply voltage DC24V±2V, 90mA（Max.）
Input/Output connector D-sub-15P（M2.6 screw）
Weight 190g /0.41lb (Excluding sensor head)

Standard accessories

 Input/Output connector 1pc
Quick manual 1pc

IO and analog GND are not isolated from the power GND.