Product Fillter

Model: SMD

Model: SMD

Sputtering System

This is one of the Model: SMD with a total sales record of over 1,400 units. It is a multi-chamber sputtering system designed for forming metal films, ITO, IGZO, dielectric films, and more, primarily that is mainly used in the high-definition display industry.

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Features

  • Wide range of deposition processes are supported, based on ULVAC's abundant experience and data.
  • Substrate-only transfer and side deposition method enable low particle generation.
  • Low-temperature deposition technology for touch sensors.
  • Automated film process tuning technology.

Applications

  • TFT (Thin-film transistor) for high definition display
  • Touch sensor panel

Specifications

Model G6 G8.5～G8.6
SMD-1800 SMD-2500X
Substrate size (mm) 1500 × 1850 2200 × 2500 ～ 2290 × 2620
Deposition method Side deposition method substrate-fixed deposition
Chamber configuration 1) Loading/Unloading chambers (※1) 2
2) Transfer chambers 1
3) Sputter chambers Max 4
High vacuum evacuation system Cryopump or turbo molecular pump
Substrate transfer system Vacuum transfer robot (Double arm type)

 

*1 Substrate heating heater can be optionally installed.