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Product Fillter

Model: SIV, SCV

Model: SIV,SCV

Sputtering System

These systems are ideal for depositing a variety of materials and can accommodate a wide range of substrates. Featuring ULVAC's proprietary transfer system, they offer excellent cost performance and provide a highly versatile solution for various applications, making it an ideal in-line vertical pass-by type deposition systems.

Image

Features

  • Electronic device

Applications

  • Panel packaging

Specifications

Model SIV SCV
Deposition method Pass-by
Deposition direction Side