Vacuum Furnace System

ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.

Vacuum Furnace System Batch Type COMBAT Series

COMBAT series are used for various purpose such as quenching and brazing of various metals.Equipped with high pressure and large flow of inert gas cooling unit, it can be used for rapid quenching.

Vacuum Brazing Furnaces FB Series

vacuum furnaces

The FB Series are systems for brazing heat exchangers such as EGR coolers, radiators and evaporators. The wide array of models available ranges from batch types to continuous types, and models for processing special items  can also be made to
order

Horizontal Type Vacuum Heat Treatment Furnace FHH series

FHH-60GH

FHH series are used for various purposes such as quenching, tempering, sintering and brazing of various metals. Chamber configuration can be multiplied up to 3 chambers by adopting fork carry system.

Hot Roller Type Vacuum Heat Treatment Furnace FHHn series

FHH6-6150

FHH series are used for various purposes, such as tempering, sintering, brazing of various types of metal.

Vacuum Sintering Furnaces FSC Series

fsc

Vacuum sintering technology has growing industrial and
consumer applications. The performance of rare-earth magnets has increased in recent years, enabling their use in computer drive motors and medical magnetic resonance equipment.  Tantalum capacitors are also used in mobile phones.

Batch-type Vacuum Heat Treatment Furnace FHB-60C

FHB60C

It is applicable to wide range vacuum heat treatments
such as quenching, annealing, tempering, sintering,
brazing etc for various metal parts.

Vacuum Induction Melting Furnaces FMI Series

fmi

These furnaces are contributingto a wide range of industry applications such as specialized steel, electronics materials and new materials. They have been used in developing new technologies such as high-vacuum degassing and refining using cryopanels, and multi-element alloys created by single-direction agitation systems. ULVAC can also provide equipment lines and
production technology for rare-earth magnet manufacturing.

Vertical Type Vacuum Heat Treatment Furnace FHV Series

FHV-90GH

FHV series are used for various purposes such as quenching, tempering and brazing of various metals. Vertical two-chamber configuration which consists of heating chamber + preparation/cooling contributes to space saving by adopting elevation mechanism.
Temperature data from heating process to cooling process can be seamlessly recorded for quality control of products.