R&D Equipments

Innovative and advanced vacuum technologies to blaze a trail for the future. ULVAC has been providing
all kinds of industries with vacuum technology based products and materials essential for them under
the basic managerial philosophy of "aiming at contributing to the evolution of industries and sciences
by using vacuum technologies and all peripheral technologies.

Rapid Thermal Annealers

Heating evaluation testing

SSA Series

Mini Lamp Annealer MILA-5050

QHC Series

MIRO MR39H/D

VHC Series

HT-RTA59HD

Thermoelectric Testers

ZEM-3 Series

PEM-2

ZEM-5

Laser PIT

STPM-1000

TC-9000

Mini-PEM

TCN-2-Omega

Rapid Heating & Cooling IR Furnace

RHL-E

RHL-P

RHL-Ps/Pss

VHT-E

X-Ray Photoelectron Spectroscopy / XPS

PHI Quantes

PHI 5000 VersaProbe III

PHI X-tool

PHI Quantera II™

Auger Electron Spectroscopy / AES,SAM

PHI 710

PHI 4700 Thin Film Analyzer™

Time-of-Flight SIMS / TOF-SIMS

PHI nanoTOF II™

Dynamic SIMS / D-SIMS

PHI ADEPT-1010™

Sheet Steel Annealing Simulator

CAS Series

ARC Plasma Deposition

Arc Plasma Deposition

Vacuum Coater

VPC Series

DEPOX Series

Other Equipments

Micro Paddle

Microbial Activity

Gravite Control Device