R&D Equipments

Innovative and advanced vacuum technologies to blaze a trail for the future. ULVAC has been providing
all kinds of industries with vacuum technology based products and materials essential for them under
the basic managerial philosophy of "aiming at contributing to the evolution of industries and sciences
by using vacuum technologies and all peripheral technologies.

Rapid Thermal Annealers


Mini Lamp Annealer MILA-5000 series
Perfect for research and development on small samples.Capable of high-speed heating, high-speed cooling, and clean heating.


Infrared Lamp Heating System QHC series

The QHC series is a high-speed heating and cooling system, a combination of an Infrared Gold Image Furnace and temperature controller...

High Temperature Rapid Thermal Annealing System HT-RTA59HD
This desktop ultra-high temperature annealing system achieves high reflection efficiency by heating in a focused manner precious materials like SiC and other small materials with high melting points.


Simplified Infrared Lamp Heating System SSA series
A simplified system with an Infrared Gold Image Furnace and a quartz chamber.A low-cost heating system consist of an Infrared Gold Image Furnace and quartz chamber including a sample holder.

 


Mini Lamp Annealer MILA-5050
This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.


Variable Atmosphere Lamp Heating System VHC series
The VHC series is equipped with vacuum pump system and Pirani vacuum gauge as well as the features of QHC series.


Spot Focused Infrared Gold Image Furnace System MIRO series
A compact spot focused Infrared Gold Image Furnace capable of heating up to 1800 °C. This furnace can be used for zone melting and basic SiC power device experiments.

Thermoelectric Testers

Seebeck Coefficient / Electric Resistance Measurement System ZEM-3 series
A simplified system with an Infrared Gold Image Furnace and a quartz chamber. A low-cost heating system consist of an Infrared Gold Image Furnace and quartz chamber including a sample holder.

Scanning Thermal Probe Micro-image STPM-1000
STPM-1000 is used for evaluating Seebeck coefficient and thermal conductivity simultaneously. Simple evaluation of thermoelectric materials is possible by simultaneous evaluations of seebeck coefficient and thermal conductivity. 

Power Generation Efficiency Characteristics Evaluation System PEM-2
Property evaluations of thermoelectric generator modules

Laser Flash Method Thermal Constant Measurement System TC-9000 series
Thermal conductivity measurements of a wide variety of materials from polymers to metals. 

Seebeck Coefficient / Electric Resistance Measurement System ZEM-5 series
A series corresponding to special specifications for the properties of various thermoelectric materials and thin films

Thermoelectric Conversion Efficiency Evaluation System for Small Modules Mini-PEM
Measure thermoelectric conversion efficiency for thermoelectric material alone and a pair of thermoelectric material

AC Method Thermal Diffusivity Measurement System LaserPIT
Thermal conductivity evaluations of various films in the surface direction

2-Omega Method Nano Thin Film Thermal Conductivity Meter TCN-2ω
Capable of easily evaluating thermal conductivity of nano-thin films.
 

Rapid Heating & Cooling IR Furnace

Infrared Gold Image Furnace RHL-E series
Infrared Gold Image Furnaces are used in various fields for research and development or as production equipment.

Infrared Gold Image Furnace Ps, Pss series
Usable in wide range of fields from carbon nanotube growth systems to production systems. 

Infrared Gold Image Furnace RHL-P series
Infrared Gold Image Furnaces are used in various fields for research and development or as production equipment.

Infrared Gold Image Furnace VHT-E series
Infrared Gold Image Furnaces are used in various fields for research and development or as production equipment.

X-Ray Photoelectron Spectroscopy / XPS

PHI Quantes
Pioneer into a new area with an XPS equipped with both hard X-ray & conventional soft X-ray source.

PHI X-tool
This high performance scanning XPS instrument comes with a low price yet makes measurements for all types of applications and features easy, intuitive operation.

PHI 5000 VersaProbe III
Multi-technique scanning XPS microprobe that provides the highest performance spectroscopy with a sophisticated equipment design.

PHI Quantera II™
The world's highest performance XPS microprobe that provides automated micro-area spectroscopy.

Auger Electron Spectroscopy / AES,SAM

PHI 710
The only scanning Auger nano probe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.

PHI 4700 Thin Film Analyzer™
The analyzer employs a high sensitivity energy analyzer having the world's best Auger sensitivity of 1.6 Mcps (10 nA for current value).

Time-of-Flight SIMS / TOF-SIMS

PHI nanoTOF II™
This new TOF-SIMS instrument has the added flexibility needed to support diversified analysis application and also provides automated measurement from sample loading through to measurement.

Dynamic SIMS / D-SIMS

PHI ADEPT-1010™
ADEPT-1010 is a perfect choice for analyzing shallow implanted dopants in semiconductors and other materials as well as analyzing thin films and multilayer films.

Continuous Annealing System for Steel Sheet CAS series

CAS series
The CAS series achieves high-speed heating and cooling with the use of an Infrared Gold Image Furnace, direct temperature control of the samples, and easy atmosphere production.

ARC Plasma Deposition

Arc-Plasma Deposition APD series
This is the only vacuum deposition system capable of creating nanoparticles and nano thin film with new specific capacities by generating metal ions through pulse arc discharge.

Vacuum Coater System

High Vacuum Pumping Systems  VPC Series
Small-sized high-vacuum low cost exhaust equipment that must be stored compactly, such as oil diffusion pumps, oil rotary vacuum pumps, valve piping, electrical systems and pressure measurement ports in pipe frames. Ideal for experiments requiring easy handling and maintenance.


Vacuum Coater DEPOX Series
Small-sized high-vacuum low cost exhaust equipment that must be stored compactly, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in stands. 

Equipment for MBE

Water-Cooling MBE

Water-Cooling MBE

Water-Cooling MBE

Water-Cooling MBE

Water-Cooling MBE

Water-Cooling MBE

Water-Cooling MBE

Water-Cooling MBE

Other Equipments

Precise Microplate Paddle Mixer MICROPADDLE
Precise microplate paddle mixer "MICROPADDLE" enables direct mixing for 96 well microplate, features high precision and accuracy, wide rotation speed setting and independent rotation control for each column, promise your laboratory works more comfortable and efficiency.

Packaging Leak Test PLT Series
Vacuum Packaging Leak Test(PLT) is used in food industry, beverage, pharmaceuticals, personal care etc. By vacuum pump, PLT’s negative pressure is generated to test the
hermetic sealing quality and performance of packaging bags, bottles and can etc.

QCM Based Molecular Interaction Analyzer
AFFINIX Series can analyze molecular association, dissociation, polymerization and decomposition, in label-free and real-time manner, by measuring resonant frequency change of a crystal oscillator. 

Gravite  Clinostat

Regenerative medicine,Space Biology,Drug discovery,etc.