ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.

Vacuum Furnace System COMBAT Series

COMBAT series are used for various purpose such as quenching and brazing of various metals.Equipped with high pressure and large flow of inert gas cooling unit, it can be used for rapid quenching.

Horizontal Type Vacuum Heat Treatment FurnaceFHH series

FHH series are used for various purposes such as quenching, tempering, sintering and brazing of various metals. Chamber configuration can be multiplied up to 3 chambers by adopting fork carry system.


Vacuum Induction Melting Furnaces
FMI Series,Magcaster Series

These furnaces are contributing to a wide range of industry applications such as specialized steel, electronics materials and new materials. They have been used in developing new technologies such as high-vacuum degassing and refining using cryopanels, and multi-element alloys created by single-direction agitation systems.

Vertical Type Vacuum Heat Treatment Furnace FHV Series

FHV series are used for various purposes such as quenching, tempering and brazing of various metals. Vertical two-chamber configuration which consists of heating chamber + preparatioan/cooling contributes to space saving by adopting elevation mechanism.

Vacuum Brazing Furnaces FB Series

The FB Series are systems for brazing heat exchangers such as EGR coolers, radiators and evaporators. The wide array of models available ranges from batch types to continuous types, and models for processing special items  can also be made to

Hot Roller Type Vacuum Heat Treatment Furnace FHHn series

FHH series are used for various purposes, such as tempering, sintering, brazing of various types of metal.

Vacuum Sintering Furnaces FSC Series

Vacuum sintering technology has growing industrial and consumer applications. The performance of rare-earth magnets has increased in recent years, enabling their use in computer drive motors and medical magnetic resonance equipment.  Tantalum capacitors are also used in mobile phones.


Batch-type Vacuum Heat Treatment Furnace FHB-60C

It is applicable to wide range vacuum heat treatments such as quenching, annealing, tempering, sintering,
brazing etc for various metal parts.