ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD)
used in general industrial fields and semiconductor/electronic device fields.
These furnaces are contributingto a wide range of industry applications such as specialized steel, electronics materials and new materials. They have been used in developing new technologies such as high-vacuum degassing and refining using cryopanels, and multi-element alloys created by single-direction agitation systems. ULVAC can also provide equipment lines and
production technology for rare-earth magnet manufacturing.
FHV series are used for various purposes such as quenching, tempering and brazing of various metals. Vertical two-chamber configuration which consists of heating chamber + preparation/cooling contributes to space saving by adopting elevation mechanism.
Temperature data from heating process to cooling process can be seamlessly recorded for quality control of products.