G-Tran Series Pirani Gauge Measuring Units

The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head  and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).

Features
◙ Transducer spec
If you don’t need a pressure display device:
・You can lower the costs associated with a vacuum gauge
・You can save space by minimizing the control panel.
◙ Replacing sensor heads is greatly simply fied.
◙ Corrosion-resistant platinum is used for the filament material
◙ You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
◙ Able to output 2 set points
◙ SP1: Pressure reading  is a 0 to 5V output (non-linear)
◙ Able to operate at 24VDC power input
Applications
◙ Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
◙ Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
◙ Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

Specifications

CATALOG DOWNLOAD [PDF]