The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).
◙ Transducer spec
If you don’t need a pressure display device:
・You can lower the costs associated with a vacuum gauge
・You can save space by minimizing the control panel.
◙ Replacing sensor heads is greatly simply fied.
◙ Corrosion-resistant platinum is used for the filament material
◙ You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
◙ Able to output 2 set points
◙ SP1: Pressure reading is a 0 to 5V output (non-linear)
◙ Able to operate at 24VDC power input
◙ Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
◙ Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
◙ Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.
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