A pressure sensor unit that is adopting a semiconductor type thin-film element. By this can measure near to the atmospheric pressure (Gauge pressure : -100kPa～10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.
◙ Suitable for atmosphere pressure check：
Pressure standard is corresponding with gauge pressure and a high accuracy measurement is capable
◙ Corresponding to the continuous use of high vacuum pressure process：
Semiconductor type thin-film element (SUS316L) is adopted to be compatible for a high
◙ Measurement output signal：Pressure is set to DC 0 to 5V Log out signal as a standard.
◙ Rotate Generator : Compatible in wide for DC12 to 24V
◙ Quick coupling standard : Adopting a NW16 port
◙ To confirm the atmospheric pressure of PV, FPD, SEMICONDUCTOR system which contain high vacuum components.
◙ To confirm the atmospheric pressure of Industrial Vacuum Equipment like furnace systems which contain high vacuum components.
◙ To the vacuum system that require the high accuracy measurement of -100kPa～0kPa Gauge pressure (Absolute pressure：10+4～10+5Pa )
CATALOG DOWDLOAD [PDF]