Turbo Molecular Pump UTM-MI series ,Controller Integrated turbo mplecular pump with magnetic bearings saves wiring work and installation space.
- Controller integrated with the pump body: No wiring work between pump body and controller.
- Free mounting direction: Free mounting direction makes the system design flexible.
- 5 models from 1000L/s to 4000L/s class.
- Wide range and high flow for the light processes.
- Pump rotation variable from 25% to 100%: Enabling the pressure adjustment in a chamber.
- High durability and safety: Safety confirmation tests ars passed. Such as air rushing-in test and touch down test.
- Main vacuum pumping system for equipment
– Semiconductor Equipment
– Sputtering System
– Analytical Equipment
– Experimental device and etc.
- Main vacuum pumping system for the light processes that do not generate side reaction products.
- Replacement from oil diffusion pumps.
- General use for high vacuum evacuation system.