Turbo Molecular Pump UTM-MI series ,Controller Integrated turbo mplecular pump with magnetic bearings saves wiring work and installation space.


  • Controller integrated with the pump body: No wiring work between pump body and controller.
  • Free mounting direction: Free mounting direction makes the system design flexible.
  • 5 models from 1000L/s to 4000L/s class.
  • Wide range and high flow for the light processes.
  • Pump rotation variable from 25% to 100%: Enabling the pressure adjustment in a chamber.
  • High durability and safety: Safety confirmation tests ars passed. Such as air rushing-in test and touch down test.



  • Main vacuum pumping system for equipment
    – Semiconductor Equipment
    – Evaporator
    – Sputtering System
    – Analytical Equipment
    – Experimental device and etc.
  • Main vacuum pumping system for the light processes that do not generate side reaction products.
  • Replacement from oil diffusion pumps.
  • General use for high vacuum evacuation system.

Pumping Principle






Pumping Structures








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Turbo Molecular Pump UTM-MI series