Oil Rotary Vacuum Pump VD Series

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VD series is a Double stage rotary vane type direct-driven oil rotary vacuum pump equipped withULVAC’s original multi-voltage motor.
This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.
Design optimization and wide option realized quiet operation and so this pump is
suitable for a wide range of applications.

features

Multiple voltage motor fully developed by ULVAC

A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
Forced oil circulation system

Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
Various options are available for special application

In addition to the standard model, we also offer models for special applications.

Specification	Model	Main	Independent oil filling (oiler)	He Leak Test
Standard	VD30C, VD40C, VD60C, VD90C	Fluorine Rubber	n/a	n/a
Spec. A	VD30C-A, VD40C-A	Nitrile Rubber	n/a	n/a
Spec. B	VD30C-B, VD40C-B	Silicon Rubber	–	n/a
Spec. H	VD30C-H, VD40C-H, VD60C-H, VD90C-H	Fluorine Rubber	–	–

Applications

Evaporation, sputtering, and ion plating
Analytical instrument and leak test system
Gas exchange, liquid filling

Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
Vacuum chuck and vacuum molding
Other vacuum equipments

Specifications

Model			VD30C	VD40C	VD60C	VD90C
Designed pumping speed		50Hz	30 m³/h/ (500 L/min)	40 m³/h/ (670 L/min)	60 m³/h/ (1000 L/min)	90 m³/h/ (1500 L/min)
		60Hz	36 m³/h/ (600 L/min)	48 m³/h/ (800 L/min)	72 m³/h/ (1200 L/min)	108 m³/h/ (1800 L/min)
Ultimate pressure *1	GP Close		≦ 0.67 Pa
	GP Open		≦ 6.7 Pa
Maximum water vapor tolerance	GP Open	50Hz	1300 Pa	1360 Pa	1320 Pa	970 Pa
		60Hz	1400 Pa	1760 Pa	2800 Pa	2820Pa *2
Maximum water vapor capacity	GP Open	50Hz	190 g/h	270 g/h	430 g/h	480 g/h
		60Hz	250 g/h	410 g/h	1100 g/h	1650 g/h *2
Motor *3	Type of motor		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE3
	Power		1.5 kW(4 poles)	1.5 kW(4 poles)	2.2 kW(4 poles)	3.7 kW(4 poles)
	Voltage	50Hz	200 ～ 240 /380 ～ 415 V
		60Hz	200 ～ 240 /380 ～ 460 V
Oil			ULVOIL R-72
Oil capacity			1.0 ～ 2.5 L		2.5 ～ 4.0 L
Cooling method			Air cooled
Inlet port connection JIS B 2290 ( ISO KF )			VG40 equivalency / KF40 ( optional )		VG50 equivalency / KF50 ( optional )
Outlet port connection JIS B 2290 ( ISO KF )			VG40 equivalency / KF40 ( optional )
External dimension WxDxH			210×660× 324mm	210×680× 324mm	280×761× 371mm	280×831× 371mm
Weight			58kg	60kg	90kg	113kg
Applicable standard			CE
Standard accessory			A dose of oil
Recommended oil mist trap ( Optional ) *4			TM201: for low load operation		TM401: for low load operation
			TM401: for high load operation		TM-2: for high load operation
Option			Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application ( spec A, B and H )

Note) This specification uses SI measurement units. Conversion to non-SI units is as follows :
　　　6.7 Pa = 5 × 10^-2 Torr
*1　Measured with a Pirani gauge.
　　( Apprx. 6.7 x 10^-2 Pa when measured with a McLeod vacuum gauge. )
*2　VD90C is not allowed the continuous operation in the inlet pressure at 1,000 Pa or
　　 more and the maximum water vapor tolerance / maximum water vapor capacity
　　(in the continuous operation)is 1,000 (Pa) / 600 (g/h).
*3　Factory shipment setup is 200V class Δ delta connection.
　　 Please change it to Y connection if working voltage is 400V class.
*4　High load operation means repeat pumping down between atmospheric pressure and
　　 vacuum in short term or long time operation at 10,000 Pa (75 Torr ) or higher.

Model			VD151	VD201
Designed pumping speed		50Hz	14.4 m³/h/ (240 L/min)	20.2 m³/h/ (336 L/min)
		60Hz	17.3 m³/h/ (288 L/min)	24.2 m³/h/ (403 L/min)
Ultimate pressure *1	GP Close		≦ 0.67 Pa
	GP Open		≦ 6.7 Pa
Maximum water vapor tolerance	GP Open		500 Pa	1300 Pa
Maximum water vapor capacity	GP Open		40 g/h	138 g/h
Motor	Type of motor		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE2 *3	IE3
	Power		0.55 kW( 4 poles)	0.7 kW(4 poles)
	Voltage	50Hz	200 ～ 240 / 380 ～ 415 V
		60Hz	200 ～ 240 / 380 ～ 460 V
Oil			ULVOIL R-72
Oil capacity			0.7 ～ 1.1
Cooling method			Air cooled
Inlet port connection			KF25 equivalency
Outlet port connection			G1
External dimension WxDxH			170×514×240 mm	170×536×265 mm
Weight			29 kg	34 kg
Applicable standard			CE / cTUVus
Standard accessory			A dose of oil
Recommended oil mist trap ( Optional ) *5			TMX-1 + adapter flange
Option			Oil mist trap

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
　　　6.7 Pa = 5 × 10^-2Torr
*1 　Measured with a Pirani gauge. ( Apprx. 6.7 x 10^-2 Pa when measured with a McLeod vacuum gauge. )
*2 　Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if
　　 working voltage is 400V class.
*3 　The energy efficiency regulation is not applicable for this motor.