Compact and light weight with direct drive. Low vibration and noise with precise manufacturing technology. Few contamination in the discharge system due to oil free pumping room.
The PMB series Ver. D is a wide use mechanical booster pump with multiple voltage motor (high efficiency). It is possible to run with air-cooled depending on use condition. And surface treatment and atmospheric operation type are select as option.
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed of or semiconductor and liquid crystal display processes which especially require cleanliness.Atmospheric pressure start type can be selected as option.
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
