ULVAC Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms.
Pump structure makes Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on your required pressure
and pumping volume.
- Pump structure makes maintenance easy and provides an oil-free vacuum environment
- Various pumping speeds and stage arrangements are selectable depends on your required
pressure and pumping volume
- Vacuum chucks, wafer and tip handling devices
- Vacuum tweezers, medical appliances
- Printing equipment
- Automatic packing machines
- Optical appliances
Diaphragm Type Dry Vacuum Pumps DA Series
Diaphragm Type Dry Vacuum Pumps DAP Series
Diaphragm Type Dry Vacuum Pumps DAT Series