➤ No requirement for cooling water and nitrogen gas.
➤ Low power consumption, air tight and light weight are featured in this pump.
➤ Possible to pump down water vapor by use of gas ballast.
➤ Integrated silencer results in a compact design.
➤ Water vapor pumping for vacuum dryer equipment (gas ballast is required)
➤ Vacuum equipment such as sputtering, evaporator, etc
*1 Ultimate pressure is a value without gas ballast gas.
*2 Please specify phase and voltage when ordering.
*3 The valve for gas ballasts is an option.
*4 Maximum water vapor tolerance is a value when gas ballast is used.
Make sure to use a gas ballast mechanism.