Dry Vacuum Pump
ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
ULVAC’s unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications. ULVAC’s ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
The DTC pump is the ultimate small pumping solution for corrosive gases. All contacted components are made of corrosion resistant PTFE or FPM so that your pump won’t break down due to the caustic nature of your working gas.
DTC pumps come in a small, clean form-factor ideal for use in the laboratory environment.