Cryo Pump

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
 

Features

  • Excellent pumping performance for a 4-inch cryopump
  • High pumping speed improves the pumping efficiency and productivity.
  • Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
  • Up to four units can be run by one compressor.
  • Customized design is available to fit your needs.

Specifications

Model     U4H     U6H U8H / U8H-U U8HL U10H U12H  U12HL
Pumping speeds(20degrees) Nitrogen L/s 450 750 1,700 1,500 2,400 4,000 4,000
Hydrogen 500 1,100 2,700 2,200 3,600 6,000 6,800
Argon 370 620 1,400 1,200 2,000 3,300 3,300
Water 1,100 2100 4,000 4,000 6,900 9,500 9,500
Ultimate pressure Pa 10-7 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9)
Maximum throughput Argon Pa・L/s 1.3×103 1.1×103(7.9) 1.2×103(8.9) 1.2×103(8.9) 8.0×102(6.0) 2.0×103(15) 2.0×103(15)
Pumping capacity Argon Pa・L 1.0×107 1.1×102(0.8) 2.4×102(1.8) 1.6×102(1.2) 1.5×102(1.1) 4.1×102(3.1) 4.1×102(3.1)
Hydrogen 1.5×105 5.6×107(4.2×105) 1.0×108(7.6×105) 1.6×108(1.2×106) 1.0×108(7.8×105) 2.1×108(1.6×106) 3.1×108(2.3×106)
Cooldown time min(50/60Hz) 45/50 3.1×105(2.3×103) 1.0×106(7.6×103) 1.2×106(9.0×103) 6.7×105(5.0×103) 9.8×105(7.4×103) 9.8×105(7.4×103)
Weight of cryopump Kg 14.5 19 20.8 20 29 40 40

 

Model     U16 U16P U20P U20H U22H U22P U22WB U30H
Pumping speeds(20degrees) Nitrogen L/s 5,000 5,000 10,000 10,000 17,000 11,500 13,000 28,000
Hydrogen 10,000 10,000 18,000 18,000 25,000 14,000 16,500 43,000
Argon 4,200 4,200 8,400 8,400 14,000 9,700 11,000 23,000
Water 16,000 16,000 29,000 29,000 39,000 39,000 39,000 70,000
Ultimate pressure Pa 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9) 10-7(10-9)
Maximum throughput Argon Pa・L/s 1.4×103(11.0) 1.6×103(12) 1.1×103(8.7) 1.7×103(12.8) 4.1×103(31) 1.7×103(12.8) 3.5×103(26) 2.7×103(20)
Pumping capacity Argon Pa・L 4.1×102(3.1) 4.5×102(3.4) 5.0×102(3.7) 5.0×102(3.7) 1.3×103(9.6) 5.0×102(3.7) 1.3×103(9.6) 7.4×102(5.6)
Hydrogen 4.3×108(3.3×106) 4.3×108(3.3×106) 5.8×108(4.4×106) 5.8×108(4.4×106) 8.1×108(6.1×106) 5.8×108(4.4×106) 8.1×108(6.1×106) 7.8×108(5.9×106)
Cooldown time min(50/60Hz) 2.4×106(1.8×104) 2.4×106(1.8×104) 4.6×106(3.4×104) 4.6×106(3.4×104) 8.5×106(6.4×104) 6.0×106(4.5×104) 8.5×106(6.4×104) 1.5×107(1.1×105)
Weight of cryopump Kg 61 61 69 72 125 115 125 175

*Maintenance interval: every 16,000 hours