Transducer Type Pirani Vacuum Gauge SP1 Series

The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).

Features

  • Transducer spec
    If you don't need a pressure display device:
    ・You can lower the costs associated with a vacuum gauge
    ・You can save space by minimizing the control panel
  • Replacing sensort heads is greatly simplyfied
  • Corrosion-resistant platinum is used for the filament material
  • You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
  • Able to output 2 set points
  • SP1: Pressure reading is a 0 to 5V output (non-linear)
  • Able to operate at 24VDC power input

Applications

  • Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
  • Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
  • Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

Specifications

Type Sensor unit
Model SP1
Compatible sensor head WP-01, WP-02, WP-03, WP-16
Accuracy

 

±15 %(51 Pa ~760 Pa)
±30 %(10 Pa ~1000 Pa)
±50 %(0.4 Pa ~3000 Pa)
Operating temperature range 10 ~ 40℃
Measurement value output Nonlinear output: 0 to 5VDC (Max. 10V)
Setpoint 1/2 Pressure setting adjustment monitor Nonlinear output: 0 to 5VDC (Max. 10V)
Control output signal Open collector output, Negative logic
ERROR signal
Setpoint 1/2
LED display Power, error, set point 1, set point 2
Power supply voltage DC24V±2V, 90mA(Max.)
Input/Output connector D-sub-15P(M2.6 screw)
Weight 190g /0.41lb (Excluding sensor head)
Standard accessories Input/Output connector 1pc
Quick manual 1pc

IO and analog GND are not isolated from the power GND.