Ceramic Capacitance Manometer CCMT-D Series

The CCMT-D series is a capacitance manometer, which detects static electric capacitance occurring when a barrier membrane made of ceramic (alumina) is deformed by changes in gas pressure.


  • Corrosion resistant ceramic sensor

  • Exellent long term signal stability

  • Whole pressure measurement that does not depend on the gas types is possible

  • Shorten the warm-up Time

  • Temperature compensation

  • Sensor protected against contamination

  • Push button zero point adjustment

  • Accurate linear output (DC 0 to 10V)

  • Wide range voltage power supply (DC14 to 30V)


  • Vacuum melting or vacuum heat treatment

  • Thin films deposition system

  • Pressure reduction furnaces

  • Gas exchange or gas sealing etc.

  • PV, FPD manufacturing equipment


Model CCMT-D
Range full scale CCMT-1000D 133kPa (1×103 Torr, 1.33×103 mbar) F.S.
CCMT-100D 13.3kPa (1×102 Torr, 1.33×102 mbar) F.S.
CCMT-10D 1.33kPa (10 Torr, 13.3 mbar) F.S.
CCMT-1D 133Pa (1 Torr, 1.33 mbar) F.S.
Resolution 0.003% of full scale
Accuracy *1 ±0.2%±temperature coefficient relative to display value (The value indicates accuracy zero point adjustment)
Temperature coefficient Zero voltage 0.005% F.S. /?C
Span voltage 0.01% R /?C
Operating temperature range 10 to 50?C (50 to 122?F)
Response rate 30ms or less
Material of gas contacting sections Al2O3、Vacon70 *2、SUS316 *3 , glass ceramics solder, Ag Ti Cu hard solder
Input power DC14~30V, 1W
Output DC 0 to 10V F.S.
weight 329g
Dimensions 55mm×117mm
Temperature compensation Internal temperature compensation circuit
Electrical connector D-sub 15-pin male (No.4-40, DNC screw)

*1:Non-linearity,hysteresis,repeatability at 25?C (77?C) ambient operating temperature without tenperature effects after 2 hours operation
*2:18% Cr, 10% Ni, 3% Mo, 69% Fe
*3:28% Ni, 23% Co, 49% Fe