DC Power Supply DC-10-AM

The DC-10/DC-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.

features

  • Leight-weight/ Space-saving

    Light-weight and space-saving design with excellent installation flexibility.

  • Selectable output voltage range

    We feature a lineup with 800V specifications in addition 1000V specification. Extensive arc handling

  • Extensive arc handling

    Extensive arc control methods familiar with plasma.

  • Can be equipped with a high-speed arc interruption circuit

    Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.

  • Can be equipped with a flexible parallel operation function

    DC-10, DC-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)

  • Requires no cooling water

    Forced air cooling, require cooling water.

Applications

  • Flat panel display sputtering

  • Semiconductor sputtering

  • Touch panel sputtering

  • Industrial coating sputtering

Specifications

ModelDC-10-AMDC-10-H-AMDC-10-4-AMDC-20-AMDC-20-H-AMDC-20-4-AM
Input specificationRated input voltage3-Phase 187 to 229VAC3-Phase AC342 to 440V3-Phase 187 to 229VAC3-Phase AC342 to 440V
Input capacity13.5kVA or less25kVA or less
Output specificationMaximum rated power10kW20kW
Rated current25A18A25A50A40A50A
Rated voltage-800V-1000V-800V-800V-1000V-800V
Ignition voltage-1500V
Abnormal discharge controlShutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
ControlControl methodConstant power control (P control)/constant current control (I control)/constant voltage control (V control)
Control precisionConstant power control (P Control):±0.5% or less of the rated output or ±1% of the set value, whichever is larger.
Constant current control (I Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Constant voltage control (V Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Control warranty scopeConstant power control, 10 to 100% of rated power value
Extenal interfaceanalog/digital,RS-232C or 485
Parallel operationUp to 12units can be controlled by master/slave communication
Cooling methodForced air-cooling
Dimension W×D×H483×630×133mm (excluding protrusions)
Weight29kg36kg
Applicable standardCE/ SEMI F47/ RoHS