The DPG-10/DPG-20/GPG-30 are 10kW/20kW/30kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.


  • Leight-weight/ Space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Selectable output voltage range
    We feature a lineup with 800V specifications in addition 1000V specification.
  • Extensive arc handling
    Extensive arc control methods familiar with plasma.
  • Requires no cooling water
    Forced air cooling, require cooling water.
  • Can be equipped with a high-speed arc interruption circuit
    Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
  • Can be equipped with a flexible parallel operation function
    DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)
  • Extremely low ark energy by utilizing an optional high-speed arc shutoff circuit. It contributes to high productivity and improves manufacturing yield.
  • 1200V output with high-impedance load resistance.
  • EtherCAT communication is available.


  • Flat panel display sputtering
  • Semiconductor sputtering
  • Touch panel sputtering
  • Industrial coating sputtering
  • Sputtering equipment for FPD
  • Sputtering equipment for Semiconductor
  • Sputtering device for touch panel
  • Sputtering equipment for coating industrial


Model DPG-10-AM DPG-10H-AM DPG-10-4AM DPG-20-AM DPG-20H-AM DPG-20-4AM DPG-30H-44E
Input specification Rated input voltage 3-Phase 187 to 229VAC 3-Phase AC342 to 440V 3-Phase 187 to 229VAC 3-Phase AC342 to 440V 3 phase AC 396 to 484V
Input capacity 13.5kVA or less 25kVA or less 41.5kVA or less
Output specification Maximum rated power 10kW 20kW 30kW
Rated current 25A 18A 25A 50A 40A 50A 55A
Rated voltage -800V -1000V -800V -800V -1000V -800V -1200V
Ignition voltage -1500V
Abnormal discharge control Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
Control Control method Constant power control (P control)/constant current control (I control)/constant voltage control (V control)
Control precision Constant power control (P Control):±0.5% or less of the rated output or ±1% of the set value, whichever is larger.
Constant current control (I Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Constant voltage control (V Control):±1% or less of the rated output or ±2% of the set value, whichever is larger.
Control warranty scope Constant power control, 10 to 100% of rated power value
Extenal interface analog/digital,RS-232C or 485
Parallel operation Up to 12units can be controlled by master/slave communication
Cooling method Forced air-cooling
Dimension W×D×H 483×630×133mm (excluding protrusions) 483×650×177mm (excluding protrusions)
Weight 29kg 36kg 45kg
Applicable standard CE/ SEMI F47/ RoHS


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