Turbo Molecular Pump UTM-MI Series

Turbo Molecular Pump UTM-MI series ,Controller Integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.

Features

  • Controller integrated with the pump body: No wiring work between pump body and controller.
  • Free mounting direction: Free mounting direction makes the system design flexible.
  • 5 models from 1000L/s to 4000L/s class.
  • Wide range and high flow for the light processes.
  • Pump rotation variable from 25% to 100%: Enabling the pressure adjustment in a chamber.
  • High durability and safety: Safety confirmation tests ars passed. Such as air rushing-in test and touch down test.

 

Applications

  • Main vacuum pumping system for equipment
    - Semiconductor Equipment
    - Evaporator
    - Sputtering System
    - Analytical Equipment
    - Experimental device and etc.
  • Main vacuum pumping system for the light processes that do not generate side reaction products.
  • Replacement from oil diffusion pumps.
  • General use for high vacuum evacuation system.

 

Pumping Principle

 

 

 

 

 

 

Catalog Download

Turbo Molecular Pump UTM-MI series

Pumping Structures