VS series is a single-stage oil rotary vacuum pump coupled with a direct-drive motor. ULVAC's simplified design gives this lightweight pump the features of compact size along with low vibration operation. The substantial reduction in vibration of the VS series pump can help reduce the costs associated with having to perform special foundation work in facilities where vibration can be problematic. Additionally, enhancements in both the oil circulation and cooling systems result in increased stability of pumping performance at high inlet pressures. These VS series pumps are typically used in a wide range of applications, especially those having a large number of repetitive pumping steps that cycle from atmospheric pressure, such as in the automated leak testing of parts, as well as numerous other industrial applications.
- Low vibrations and noise
- Lightweight, compact
- Enable continuous operation at full pressure
- Outstanding ease of maintenance
- Evaporation, sputtering, ion plating
- Vacuum packaging, vacuum adhesion, transport
- Vacuum heat treatment furnaces, sintering furnaces, brazing furnaces, brazing
- Vacuum drying, freeze-drying
- Gas substitution/supply, vacuum insulation
- Automated leak testing, etc.
|Design evacuation speed||50Hz||150m3/h(2500L/min)||240m3/h(4000L/min)|
|Final pressure *1||5.3Pa|
|Motor *2||Type||Totally enclosed fan cooled motor|
|number of poles||5.5kW(4P)||7.5kW(4P)|
|Required oil volume||8.0 to 10.5L|
|Oil *3||ULVOIL R-7|
|Cooling water||Pressure||≦ 0.5MPa (gauge pressure)|
|Temperature||5 to 30ºC|
|Intake size||JIS B 2290||VG80 size|
|Vent size||JIS B 2290||VG50 size|
|External dimensions W x D x H||940 x 352 x 460mm||1062 x 352 x 460mm|
|Standard accessories||Motor (attached), oil for 1 pump,
operating instructions (1 copy)
|Options||Oil mist trap, gas ballast valve, oil return mechanism|
Note:SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure: 5.3Pa=4 x 10-2 Torr
Cooling water pressure: 0.5MPa=5kg/cm2
*1 Measured by pirani vacuum gauge
*2 Options: The pump is also compatible with a increased safety explosion-resistant motor and pressure-proof explosion-resistant flange motor.
*3 Other oil types are available, upon request.
*4 Values in parentheses indicate the weight of the pump unit only.