ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.



  • Designed for large critical back-pressure
  • Extremely stable performance at pressures down to 10-2 Pa (10-4 torr)
  • Use hose flanges (except for vent flanges on ULK-04A and 06A)
  • Pumps can be cleaned easily (parts can be disassembled easily).
  • Come with mechanism to stop flow of operating fluid to auxiliary pump.





Dimension & Pumping Curve

Catalog Dowload

[wp-svg-icons icon=”file-pdf” wrap=”i”]Oil Diffusion Pump ULK Series