Dry Vacuum Pumps LS Series

High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application

Features

  • High pumping speed"
    - High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
  • Low power consumption
    - ECO-SHOCK technology realizes low power consumption (C Type)
    - Power consumption at the ultimate pressure is the industry-leading 0.6kW or less(LS120A-C)
  • Low noise
    - Built-in silencer achieves the noise level 61dB(A) or less
  • Low running-cost
  • No shaft sealing gas

※Purge gas is available with L Type.
■4 kinds of model
Pumping speed120~1200m3/h Class ※With mechanical booster pump
●Model is selectable with the optimum pumping speed according to the application

Applications

  • C Type:Clean process (LS***A-C)
    Feature:Low power consumption model (with built-in ECO-SHOCK)
    Applications:For clean process such as air and N2
    Sputtering/Vapor deposition/Lamination/Load lock room/TMP backing pump etc.
  • L Type:Light process(LS***A-L)
    Features:Light process model (with surface treatment and purge function)
    Applications:For light process such as steam and volatile liquid medicine
    Vacuum drying/Freeze drying/Ashing/General industrial use etc.

Specifications

LS Series Exhaust Performance

LS Series VDO

Download Catalog