Screw Type Dry Vacuum Pump LS Series

High pumping speed and Low power consumption dry vacuum pump. LS series is selectable from 4 different pumping speed(120-1200m3/h) by depending on the application.

Applications

C type      : Clean process (LS***A-C)
Feature      : Low power consumption model (with built-in ECO-SHOCK)
Applications   : For clean process such as air and N2 G14 Sputtering / Vapor deposition /
         Lamination / Load lock room / TMP backing pump etc.


L type      : Light process (LS***A-L)
Features    :Light process model (with surface treatment and purge function)
Applications   : For light process such as steam and volatile liquid medicine / Vacuum drying /
         Freezedrying / Ashing / General industrial use etc.

Specifications

Model (C:C Type)
(L:L Type)
LS120ALS300ALS600ALS1200A
CLCLCLCL
Max.pumping speedm3/h1203806001000
Ultimate pressurePa≦0.6≦0.1
Power supply200V Class:3Phase,50/60Hz,AC200-240V or 400V Class:3Phase,50/60Hz,AC380-480V
Power consumption *1kW0.62.01.02.51.32.61.32.7
Cooling water
flow rate
L/min>2.0>4.0
Purge gas flow rate
*2
SLM0~500~500~500~50
Max.water vapor
tolerance *3
kg/h1.51.51.51.5
Noise *1dB(A)61616264
Inlet portInlet port
KF50(Horizontal)/
VG50(Vertical)
ISO-F-50ISO-F-80ISO-F-100
Outlet portKF40KF40KF40KF40
Weightkg142220242266
Applicable standardCE、cTUVus
Standard accessoryPower connector, Waterproof cable clamp, Remote connector, Guard for power connector
Pump head optionPower supply:200V Class or 400V Class, Material of seal:FFKM(L type only)
External optionMBP inlet flange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible
Unit(Inlet, Remote), Purge gas valve

*1:  At ultimate pressure (reference only)
*2:  Purge gas is not available with C Type.
*3:  Max.water vapor tolerance is a value when purge gas is used.
Note)C type is not leakless.

Pumping Speed Curve

LS120
LS600A
LS200A
LS1200A

Dimension Drawing