High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application
- High pumping speed"
- High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
- Low power consumption
- ECO-SHOCK technology realizes low power consumption (C Type)
- Power consumption at the ultimate pressure is the industry-leading 0.6kW or less(LS120A-C)
- Low noise
- Built-in silencer achieves the noise level 61dB(A) or less
- Low running-cost
- No shaft sealing gas
※Purge gas is available with L Type.
■4 kinds of model
Pumping speed120～1200m3/h Class ※With mechanical booster pump
●Model is selectable with the optimum pumping speed according to the application
- C Type：Clean process （LS***A-C）
Feature：Low power consumption model (with built-in ECO-SHOCK)
Applications：For clean process such as air and N2
Sputtering/Vapor deposition/Lamination/Load lock room/TMP backing pump etc.
- L Type：Light process（LS***A-L）
Features：Light process model (with surface treatment and purge function)
Applications：For light process such as steam and volatile liquid medicine
Vacuum drying/Freeze drying/Ashing/General industrial use etc.