Dry Vacuum Pump LR/HR/UR

Dry vacuum pump ULVAC’s unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications. ULVAC’s ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.

features

  • The LR series pump is designed for either load lock or PVD processes.The HR series pump is designed for CVD and etch processes.
  • The UR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
  • Excellent helium pumping capability : Canned motor for safety and ease of maintenance
  • Power failure protection : Pump withstands power interruptions of up to 1000ms duration.
  • Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses.
  • Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
  • CE marking is available upon request.

application

Pump is designed for CVD or dry etching applications/designed for PVD, evaporation, or heat treatment processes/ designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

specification

ModelLR/HR
60
LR/HR
90
LR
180
LR
421
LR
421-T
UR
421-T
LR/HR
300
LR/HR
600
UR
600
LR/HR
1200
UR
1200
PumpDRPLR/HR
60
LR/HR
90
LR
180
LR
421
LR
421-T
UR
421-T
LR/HR
60
LR/HR
90
UR
90
LR/HR
90
UR
90
MBPPRC-003APRC-006APRC-012A
Max. pumping speedm3/h50Hz6211218344044041035965365310121012
60Hz801262373657011051
L/min50Hz103018603100733373336833598010900108831690016867
60Hz13332100395060801170017500
Ultimate pressurePa5.00.67
Max. inlet pressureAtmospheric pressure *
Max. exhaust pressure1.0 to Atmospheric pressure
Inlet diameter (type CE)VG50
(KF40)
VG80(KF50)VG100VG80(KF80)VG100(KF100)
Outlet diameterKF40VG50KF40
DRP: Rotor blade surface treatment
MBP: Rotor blade surface treatment○ *○ *○ *
Weightkg180245335415251371403
PowerThree phaseVAC
(Hz)
200(50/60), 220(60)180~240/380~440(50/60)200(50/60), 220(60)
CurrentAt ultimate pressureA6.9/7.111.218.920.8237.0/7.812.3/12.916.413.7/15.418.9
At max. loadA7.0/7.311.820.648.552.59.6/8.119.0/13.817.324.2/18.922.4
Cooling water Supply pressureMPa0.1 to 0.30.2 to 0.50.1 to 0.3
Cooling water
In/Out differrence
pressure
MPa>0.1>0.2>0.1
Cooling water
Flow rate
L/min>5.0>4.0>5.0>5.0
N2 gasSupply pressureMPa0.1 ~ 0.5
Regu-lated pressureMPa0.05 ~ 0.1
N2 purgeShaft purgeSLM5
Gas ballastSLM0~45None *10~450~1950~45

*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
*〇=with  ×=with out
*MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
*Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotation.

■Silencer (Option)

ModelMaterialSurface treatmentWeight (kg)Flange Connection
RS-01SUS304GBB treatment4.1NW40
RS-02SUS304GBB treatment8.3NW40
RS-03SUS304Polished plate12.5NW50

■Acceptable Table

Kit typeAgreementClampOuter ringConnection FlangeStay
RS-01 kitALR60,LR90,LR30011
RS-01 kitBLR600,LR12002211
RS-02 kitALR180(LR60,LR90,LR300)2211
RS-02 kitBLR1800(LR600,LR1200)2211
RS-03 kitALR421(-T)1111
RS-03 kitBLR3601(-T/TT/R/TR/TTR)3311