Scroll Type Dry Vacuum Pump

DIS/DISL scroll vacuum pump is a double wrap type which consists of 1 orbiting and 2 fixed scrolls. Operation from atmospheric pressure is possible. High ultimate pressure level is attainable. Low vibration and noise. Maintenance cycle can be controlled by hour meter.

features

  • Compact size with large displacement.

  • The highest level of ultimate pressure for dry vacuum pumps.

  • Safety design with built-in automatic reset type thermal protector.

  • Suppresses moisture condensation by air flush.

Applications

  • Analytical equipment.

  • Gas recovery system.

  • Coating equipment.

  • Back pump for TMP.

  • Helium leak detector.

  • Manufacturing process for semiconductor.

Specifications

DIS-90 DIS-252 DIS-501 DISL-102 DISL-503
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 90 180 200 240 500 600 100 120 433 516
Ultimate pressure Pa  5.0 1.6 1.0 20.0 30.0
Motor Single phase 100/115/ 200/230V 100V/115V/ 200V/230V 100/200/ 230V 100/115/ 200/230V 100/115/200/230V
Three phase 200V/208V/ 230V/380V/ 400V/415V/460V 200/380/ 400/415V 200/208/ 230/460V 100/200 /230V 100/115/ 200/230V 200/380/ 400/415V 200/220/ 230/460V
Weight kg 14.0 25 Single phase 44.0 Three phase 38.0 17.0 34.0
Inlet,Outlet port diameter mm KF-25 /KF-16 KF-40 / KF-25 KF-25/KF-16 KF-25(Rc1/2)/ KF-25
Ambient temperature 5~40
External dimensions mm 214(W)×308(L)×225(H) 264(W) × 397(L) × 338(H) Single Phase 290(W)×443(L)×397(H) Three Phase  292(W)×372(L)×397(H) 221(W)×380(L)×218(H) 317(W)×521(L)×280(H)

Pumping Speed Curves

  • DIS
  • DISL