Scroll Type Dry Vacuum Pump

DIS/DISL scroll vacuum pump is a double wrap type which consists of 1 orbiting and 2 fixed scrolls. Operation from atmospheric pressure is possible. High ultimate pressure level is attainable. Low vibration and noise. Maintenance cycle can be controlled by hour meter.

features

  • Compact size with large displacement.

  • The highest level of ultimate pressure for dry vacuum pumps.

  • Safety design with built-in automatic reset type thermal protector.

  • Suppresses moisture condensation by air flush.

Applications

  • Analytical equipment.

  • Gas recovery system.

  • Coating equipment.

  • Back pump for TMP.

  • Helium leak detector.

  • Manufacturing process for semiconductor.

Specifications

  DIS-90DIS-252DIS-501DISL-102DISL-503
 Unit50Hz60Hz50Hz60Hz50Hz60Hz50Hz60Hz50Hz60Hz
Actual pumping speedL/min90180200240500600100120433516
Ultimate pressurePa 5.01.61.020.030.0
Motor
Single phase100/115/
200/230V

100V/115V/
200V/230V

100/200/
230V

100/115/
200/230V

100/115/200/230V 
Three phase

200V/208V/
230V/380V/
400V/415V/460V

200/380/
400/415V

200/208/
230/460V

100/200
/230V
100/115/
200/230V
200/380/
400/415V
200/220/
230/460V
Weightkg14.025Single phase 44.0 
Three phase 38.0
17.034.0
Inlet,Outlet port diametermmKF-25 /KF-16KF-40 / KF-25KF-25/KF-16KF-25(Rc1/2)/ KF-25
Ambient temperature5~40
External dimensionsmm214(W)×308(L)×225(H)264(W) × 397(L) × 338(H)Single Phase 290(W)×443(L)×397(H)
Three Phase  292(W)×372(L)×397(H)
221(W)×380(L)×218(H)317(W)×521(L)×280(H)

Pumping Speed Curves

  • DIS-90
  • DIS-252
  • DIS-501
  • DISL-102
  • DIS-503