Diaphragm Type Dry Vacuum Pumps DAU/DTU Series

High vacuum type / Three-stages / with power cord / with switch / with thermal protector


  • Dry vacuum pump using no oil in the gas contact area.
  • High vacuum type of dry vacuum pump with improved ultimate pressure performance.
  • Usable for Sub pump of turbo molecular pump.
  • Safety design with built-in automatic reset type thermal protector.
  • Operation is possible from atmospheric pressure.
  • Simple structure and easy maintenance.


  • Backing pump for TMP.
  • Analytical equipment.
  • Biochemical analysis.
  • Gas charging.
  • Vacuum drying systems.
  • Evaporators etc.



Corresponding certificate/Voltage



The pump is stopped when the lord is operated, and the pump can’t be operated just after that.
In this case, please return the atmospheric pressure the inside of the pump.
The pump will not often operate normally if it is used with corrosive gases, organic solvents, liquids, or condensed gases (eg steam). 
The pump will not often operate normally if it is used with gases containing particles or dust etc.
It is a pump only in the room.
Please do not set it up in the place, that rain and water splash, and outdoors.

Dimension / Drawing


CAD data download(DXF)

Pumping Speed Curves