Diaphragm Type Dry Vacuum Pumps (DAP/DA/DAT Series)

Dry vacuum pump

ULVAC Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.

 

 

Features

  • Pump structure makes maintenance easy and provides an oil-free vacuum environment
  • Various pumping speeds and stage arrangements are selectable depends on your required
    pressure and pumping volume

Applications

  • Vacuum chucks, wafer and tip handling devices
  • Vacuum tweezers, medical appliances
  • Printing equipment
  • Automatic packing machines
  • Optical appliances

Specifications

dry vacuum pump

dry vacuum pump