Diaphragm Type Small Dry Vacuum Pump

ULVAC Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.


  • A standard type of dry vacuum pump with abundant results and low price.

  • Dry vacuum pump using no oil in the gas contact area.

  • Rich lineup available to suit your application.

  • One-stage exhaust system is faster than two-stage exhaust system.

  • Operation is possible from atmospheric pressure.

  • Simple structure and easy maintenance.

  • Safety design with built-in automatic reset type thermal protector.

  • By incorporating an unloader valve (Option), air can be introduced into the pump when the pump is stopped, and the pump startup characteristics can be improved.


  • Vacuum chucks, wafer and tip handling devices.

  • Vacuum tweezers, medical appliances.

  • Printing equipment.

  • Automatic packing machines.

  • Optical appliances.


Model DA-20DCDA-40SCDA-41DDA-81S       
 Unit50 Hz60 Hz50 Hz60 Hz50 Hz60 Hz50 Hz60 Hz       
Actual Pumping SpeedL/min20244046 40 467585       
Ultimate PressurePa5.33×103 19.9×103 3.3×103 13.3×103        
Motor Single phase,220V,60W,4P,Capacitor runSingle phase,220V,100W,4P,Capacitor run       
Full load currentA0.       
Inlet,Outlet pipe diametermmO.D. dia 9 x I.D. dia.5 (Rc 1/4)O.D. dia 12 x I.D. dia 8 (G1/4)         
Ambient Temperature°C7-400-40         
Overall diemensionsmm118 (W) x 242(L) x 178(H)157 (W) x 336.5 (L) x 217 (H)         

Pumping Speed Curve

Dimension / Drawing