Dry Vacuum Pump

Dry Vacuum Pump ของ ULVAC เป็นปั๊มสำหรับ กลุ่มอุตสาหกรรม เซมิคอนดักเตอร์ และ อุตสาหกรรม FPD .  มีประสิทธิภาพในการช่วยในไลน์ผลิตของ อุตสาหกรรม CVD, etching ฯลฯ

Screw Type Dry Vacuum Pump

High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.

MS series is a vacuum pump which is categorized as screw type dry vacuum pump.
Corrosion resistance and powder exhaust are improved as process resistance model based on traditional LS series.
This model is designed for the process of using corrosion gas and powder exhausting.

Multi-Stage Roots Type Dry Vacuum Pump

Uniformity of low temperature distribution. The optimum pump for the evacuation of LL chamber, in addition to the PVD processes, in which reduction of exhaust time is important to up the throughput.

Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.

Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.

Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard(CE,cTUVus).Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and cylinder.

This is a vacuum pump that evacuates by rotating the inside of the casing with two parallel rotors with a three-lobe cross section.

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Scroll Type Dry Vacuum Pump

DIS/DISL scroll vacuum pump is a double wrap type which consists of 1 orbiting and 2 fixed scrolls. Operation from atmospheric pressure is possible. High ultimate pressure level is attainable..

Diaphragm Type Dry Vacuum Pump

ULVAC Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTC series is a high corrosion resistant type.

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTU series is a high vacuum and high corrosion resistant type

Rocking Piston Type Dry Vacuum Pump

This is a vacuum pump that evacuates by reciprocating the piston in the cylinder. Simple structure and easy handling.