Dry vacuum pump

Dry Vacuum Pump ของ ULVAC เป็นปั๊มสำหรับ กลุ่มอุตสาหกรรม เซมิคอนดักเตอร์ และ อุตสาหกรรม FPD . LR/HR/UR series มีประสิทธิภาพในการช่วยในไลน์ผลิตของ อุตสาหกรรม CVD, etching ฯลฯ

Dry Vacuum Pump  LR Series

LS120High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application

Dry Vacuum Pump CR Series

Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump.IT complies with international standard(CE,cTUVus).

Dry Vacuum Pump ECO-SHOCK Series

ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption by attaching to the dry pump exhaust line. 

Diaphragm Type Dry Vacuum Pump DAU/DTU Series

Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms.Pump structure makes Oil-free environment and maintenance easy. 

Rocking Type Piston Vacuum Pump DOP Series

Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside
the cylinder. Pressurised type is available for DOP-80S which can be used as a small compressor.

Dry Vacuum Pump LR/HR/UR Series

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes.

Dry Vacuum Pump GR Series

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Diaphragm Type Dry Vacuum Pump DA Series

dry vacuum pumpDiaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy.

Diaphragm Type Dry Vacuum Pump DTC Series

The DTC pump is the ultimate small pumping solution for corrosive gases. DTC pumps come in a small, clean form-factor ideal for use in the laboratory environment.

Dry Vacuum Pump Scroll Type DIS/DISL Series

DIS/DISL scroll vacuum pump is a double wrap type which consists of 1 orbiting and 2 fixed scrolls.
Operation from atmospheric pressure is possible. High ultimate pressure level is attainable.