The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head  and circuits, for the range of 3000 to 0.4Pa
(22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).


[su_tabs active=”3″ vertical=”No”]

[su_tab title=”Features”]

  • Transducer spec
    If you don’t need a pressure display device:
    ・You can lower the costs associated with a vacuum gauge
    ・You can save space by minimising the control panel.
  • Replacing sensor heads is greatly simply fied.
  • Corrosion-resistant platinum is used for the filament material
  • You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
  • Able to output 2 set points
  • SP1: Pressure reading  is a 0 to 5V output (non-linear)
  • Able to operate at 24VDC power input

[su_tab title=”Applications”]

  • Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
  • Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
  • Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

[su_tab title=”Specifications”]