Measuring pressure from atmospheric pressure to high vacuum range by one principle is impossible in today’s technology.
Hence, complex vacuum gauges which have the sensor head with different measurement principles are prevailed. But there are some demerit on the complex vacuum gauges as below;
1. All sensor heads need to be replaced when a sensor head is broken.
2. Easy to break for the complexity of sensor heads
3. Sensor head is expensive
ULVAC adopts the separate sensor head method (patent pending) with its sensor head selectable at customer’s choise. It’s capable of measuring wide range of pressure, lowering runninng cost and stress on emviroment.
Features
- Wide pressure measuring range from atmospheric pressure to high vacuum range （10+5 to 5×10-8Pa.）(When SPU and SAU are used together
- Cost of sensor heads can be cut by multi ionization sensor head method (patent pending )
- Confirming atmospheric pressure easily and accurately (provide SAU is used)
- An advance warning will be made before the life of ionization vacuum gauge comes (patent pending)
- Error verification LED equipped
Applications
- Process control in high vacuum processes such as for photovoltaic field, FPD, semiconductor, optics and electronic parts manufacturing systems.
- Process control in high vacuum range processes such as for process control for vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment.
- For pressure measurement of high vacuum or ultra high vacuum equipment used in UHV research work.
Specifications
| Model | SH2-1 | SH2-2 | |
| Type name | Standard type | Serial communication type | |
| Connectable sensors | ST2 gauge head SWT-16 (NW16): 1 SPU Pirani vacuum gauge measuring unit: 1 (option) SAU pressure sensor unit: 1 (option) |
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| Measurable pressure range | 1×10-5 to 1×10+1 Pa | ||
| Accuracy | 1×10-4 to 3 Pa:±10% 7.5×10-7 to 2.2×10-2 Torr:±10% 1×10-6 to 3×10-2 mbar:±10% |
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| Repeatability | 1×10-4 to 3 Pa :±2％ | ||
| Sampling time | 50 ms，5x moving average | ||
| Value output | Output voltage: 0 to 10 VDC, LOG outpu：t 0.75 V/1 decade Pressure conversion equation: V=7.25+0.75＊ (LogP-2) P=10｛^ (V-7.25) / 0.75+2｝ * ＊Also combined with the output voltage for setpoint adjustment (SH2-1 only) |
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| Update time | 50msec | ||
| Control input signals | FIL ON/OFF, DEGAS ON/OFF Operates with open collector input, negative logic |
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| Control output signal | Error signal, Setpoint1/2/3, Emission valid Watch of electric power of filament Rating : 24VMAX、50mAMAX、Saturation voltage 1V |
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| Serial communication type | – | RS232C/RS-485 | |
| LED display | POWER/ERROR： Power, ERROR LED (Blinking changes depending on each mode) FIL : Emission valid LED |
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| SET1: Setpoint 1 LED SET2: Setpoint 2 LED SET3: Setpoint 3 LED |
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| Emission current | 1mA(1×10-3Pa or less)、10μA | ||
| Degas Method | Electron bombard type 1mA, 350V | ||
| Maximum pressure of sensor | 2×10+5Pa (1.5×10+3 Torr, 2×10+3 mbar) (Absolute pressure) ＊Need separate measures as a capacity to resist pressure, such as flange and clamp |
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| Internal volume of sensor | 17cm3(M-34), 19cm3(M-35), 17cm3(M-36) | ||
| Operating temperature range | 10 to 50?C (50 to 122?F) | ||
| Operating humidity range | 15 to 80% (not condensing) | ||
| Storage temperature | －20 to 65?C (－4 to 149?F) (At non-energizing, not condensing) | ||
| IP rating | IP30 | ||
| Power supply voltage | DC20 to 28V (Ripple, Noise 1% or less) Steady state 8W, Degas 19W or lower, 6A or lower when power supply turned on (4ms) |
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| Input/output connector | D-sub15-pin (M2.6 screw) | ||
| Weight | Sensor unit : 530g, B-A sensor gauge (M-34/35) : 80g, (M-36) : 300g | ||
| Dimension W×D×H | 144mm×75mm×62mm以下(Power supply) | ||
| Applicable standard | CE | ||
| Option | Multi Ionization Sensor head | M-34(NW16)、M-35(NW25)、M-36(ICF070) Material of gas contacting sections ：: 1-filament・Ir/Y2O3, 2-filament･W, Another-PtC･Mo, SUS, W |
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| Pirani Vacuum Gauge | SPU | ||
| Pirani Vacuum Sensor head | WP-16(NW16) Material of gas contacting sections : Filament-Pt, Another-BS/Ni Plating, Ni, Solder |
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| Pressure switch | SAU(NW16) Material of gas contacting sections : SUS316L | ||
| Unit cable | 0.5m、1m、2m for SPU,0.5m、1m、2m for SAU | ||
| Display unit | 1CH：Model ISG1 (DC24V) 4CH *1： Model IM1R1 (DC24V), Model IM2R1 (AC100V)< /td> |
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| Display cable | Cable between SH2 and Display unit 2m、5m、10m、15m、20m |
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| Certification Document | Inspection result data sheet, General calibration test report, JCSS calibration certification |
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*1 Non available for combination mode
SH2-1/SH2-2 have three options; simple mode with a multi ionization gauge, combination mode with a multi ionization gauge and a pirani gauge (SPU), and triple combination mode with a multi ionization gauge, a pirani gauge (SPU) and a pressure switch
| Mode | SH2-1/SH2-2 Simple mode |
SH2-1/SH2-2＋SPU Combination mode |
SH2-1/SH2-2＋SPU＋SAU Triple combination mode |
| Measurable pressure range | 5×10-8 to 1×10+1Pa | 5×10-8 to 1×10+4Pa | 5×10-8 to 1×10+5Pa |
| Accuracy | 5×10-8～1×10+1Pa： ±15% |
5×10-8～1×10+3Pa： ±15% 1.0×10+3～3.0×10+3Pa： ±30% 3.0×10+3～1.0×10+4Pa： No warranty |
5×10-8～1×10+3Pa： ±15% 1.0×10+3～3.0×10+3Pa： ±30% 3.0×10+3～1.0×10+4Pa： No warranty 1.0×10+4～1.0×10+5Pa： ±3%F.S. (3×10+3Pa･ |
| Repeatability | 1×10-6～1×10-1Pa： ±2% | ||
| Connection diagram (for Example) |  |
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