High Pressure Process Qulee CGM2 Series

"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).

Features

  • Ideal for process monitoring of various sputtering sysytem
  • No differential pumping system required (at 1Pa (7.5×10-3 Torr / 1×10-2 mbar) lower)
  • Integrated Display: No need for PC
  • Simple Operation: "One Click" function
  • Max 120℃ (248℉) high temperature bake (250℃ (482℉) when sensors are removed)
  • Electron bombard degas
  • Ion source and secondary electron multiplier protection maintenance help function
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
  • Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included:
    This software is included and compatible with (Windows 8/10)
  • QIP (Quick Install Package system) is Included:
    Auto measuring package (refer to options catalog for details)
  • Conforms with CE

Applications

  • Process monitoring for PV, FPD, and semiconductor system
  • Residual gas analysis in PVD system
  • Impurities (H2O, etc.) control in PVD system
  • For leak testing

Specifications

Model CGM2-051 CGM2-052
Mass filter type Quadrupole
Mass range 1 to 50 amu
Resolution M/ΔM=1M (10% P.H.)
Detector type Faraday cup (FC) EM Tube (SEM) / Faraday cup (FC)
Sensitivity 10⁻⁷ A/Pa SEM:10⁻⁴ A/Pa
1.33×10⁻⁵ A/Torr SEM:1.33×10⁻² A/Torr
10⁻⁵ A/mbar SEM:10⁻² A/mbar
Minimum detectable partial pressure 1×10⁻⁷ Pa SEM:1×10-10 Pa
7.5×10-10 Torr SEM:7.5×10-13 Torr
1×10⁻⁹ mbar SEM:1×10-12 mbar
Maximum operating pressure FC:2 Pa FC:2, SEM:1×10⁻² Pa
FC:1.5×10⁻² Torr FC:1.5×10⁻² SEM:7.5×10⁻⁵ Torr
FC:2×10⁻² mbar FC:2×10⁻² SEM:1×10⁻⁴ mbar
Linearity 1Pa
7.5×10⁻³ Torr
1×10⁻² mbar
Filament lr/Y₂O₂
Ionzing voltage 40eV
Emission current 0.1mA/0.4mA
Degas Electron bombard type 300V,5mA
Total pressure function Capable
One Click function Capable/He/H₂O/N₂/O₂/Any gas
One Click leak test function Capable
Power input DC24V ±10% 50W
Weight(Sensor unit/sensor) 2.1kg/0.44kg 2.2kg/0.44kg
Maximum sensor operating temperature 120℃(248℉)
Maximum bakeout temperature

(electronics removed)

250℃(482℉)
Operating temperature range 10 to 40℃ (50 to 104℉)
Operating humidity range 15 to 80% (not condensing)
IP rating IP30 (sensor unit)
Power connector MSTB2.5/3-STF-5.08
Communication interface RS232C/RS485 (with option)
External input/output connector D-sub15-pin (M2.6 screw)
Communication connector RJ-45
External input/output signal Analog input(0 to 10V)×2,External interlock input(pressure protection)×1,Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
Software Qulee QCS Ver. 4.0 later (Windows 8/10)
Standard accessories Power connector,Communication cable(3m long),Software(install CD),Instruction manual(clean paper)
Optional accessories

(Cf. Qulee optional catalogue)

QIP(Auto-measuring package spec.),Communication cable(5m,10m,15m long),AC Power adapter,USB-LAN adapter,Swinting hub(8 ports or 16ports),Input / output connecter,Jacket heater,Carry case
Applicable standard CE

※When there is no RS232C port in PC,please purchase USB/RS232C micro converter of option.

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.

 

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