Bipolar unit for dual cathode MFU-20K Series

MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator. It contributes to improved productivity and throughput at low cost.


  • Wide frequency range

    Can be operated from 10k ~ 100kHz ※1

  • Enables the larger capacity by a master/slave connection

    Parallel operation of maximum six MFU-20K is possible

  • DC output is possible

    It is possible to apply an output of input DC power generator to a cathode directly ※2


  • Reactive sputtering equipment for FPD

  • Reactive sputtering equipment for industrial coating

  • All sputtering equipment


Control power inputRated input voltageAC100V/AC240V
Input voltage fluctuation rangeAC90 to 264V
Phase, frequency1 phase 50/60Hz
Input capacity400VA
Input SpecificationOperatig voltage0 to -1000V※1
Non load voltage-1200V
Operatig current50A
Output SpecificationMaximum rated voltage1000V(RMS)※1
Non load voltageDC-1200V
Maximum Rated current50A
Oscillating frequency10k to 100kHz※2
Duty cycle10 to 90%※3
Cooling methodForced air-cooling
Dimension(W×D×H)483mm×630mm×177mm(excluding protrusions)
Applicable standardCE/SEMI F47/RoHS

Ambient operating temperature 5℃ ~ 40℃(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.