Small Capacity DC Power Supply DC-2/DC-4

The DC-2/DC-4 are 2 kW/4 kW DC power generators for sputtering.
Repeatability is excellent because of high control accuracy.


  • High control precision

    High precision of ±1% of set value even in a low power region of below 10%.

  • Wide accuracy guarantee

    Guarantee the wide range power control from 1 to 100%.

  • Light-weight/space-saving

    Light-weight and space-saving design with excellent installation flexibility.

  • Requires no cooling water

    Forced air cooling, requires no cooling water.

  • High reliability

    Our accumulated knowledge as an equipment manufacturer has been reflected in the design.


  • Sputtering equipment for R&D

  • BIAS power supply of sputtering equipment


Input specificationRated input voltageAC208V/220V
Input voltage fluctuation range180 to 242VAC
Phase, frequencyThree phase, 50/60Hz
Input capacity3.5kVA6.2kVA
Output specificationMaximum rated power2kW4Kw
Rated current5A10A
Rated voltage800V
Output polarityNegative polarity
Abnormal discharge controlShutoff by inverter stop or stop by resonance
ControlControl methodConstant power control (P control) / Constant current control (I control) /Constant voltage control (V control)
Control precision±1% of set point (In our prescriptive resistance value.) 
Control compensation rangeConstant power control, 1 to 100% of rated power value
Parallel operationNothing
InterfaceAnalog/Degital,RS-232C or RS-485
Cooling methodForced air-cooling
Dimension(W×D×H)241mm×610mm×133mm(excluding protrusions)
Applicable standardCE/SEMI F47/RoHS

Ambient operating temperature 5℃ ~ 40℃(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.